Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: B (w/Earth Leakage Breaker)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BJ (B + J)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: M (Applicable to Deionized Water Piping)

Cooling Method: Air-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: w/Earth Leakage Breaker

Cooling Method: Air-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: B + J

Cooling Method: Air-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: Applicable to Deionized Water Piping

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

rod Bore size (mm) Bore size (mm) FT FY FX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 212 M16 x 1.5 25 22 18 7 14 66 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 78 231 M20 x 1.5 30 27 22.4 9 19 73 226 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 257 M24 x 1.5 35 32 28 11

15

Note 5) Each value is a guide. Use such value to select a motor capacity.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

ZP

29.5 46 6 6 25 Width across flat 22 (Hexagon) 81.5 4 x M5 x 12 Rc1/8 Width across flat 22 (Hexagon) 45 80.5 Rc1/8 (G) F 70 (G) 20 28.5 19 50 Y X Y X F E B A D 34 4 30 4 x M4 x 10 E B A D 40 4 30 Dimensions Dimensions B 65 83 ZP2-XF63HB ZP2-XF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 112 X 40.6 46.1 Y 21.5 27.5 B 103 129 ZP2-XF100HB ZP2-XF125HB Model D 69 89 A 100 125 E 107 135 F 47.5

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 50 40 30 20 10 0 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 50 40 30 20 10 0 Transfer load m (kg) Refer to page 71 for deflection data. 42 46 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FPH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

MGP

as a stopper, select a model with a stroke of 50mm or less.

ZP

29.5 46 6 6 25 Width across flat 22 (Hexagon) 81.5 4 x M5 x 12 Rc1/8 Width across flat 22 (Hexagon) 45 80.5 Rc1/8 (G) F 70 (G) 20 28.5 19 50 Y X Y X F E B A D 34 4 30 4 x M4 x 10 E B A D 40 4 30 Dimensions Dimensions B 65 83 ZP2-XF63HB ZP2-XF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 112 X 40.6 46.1 Y 21.5 27.5 B 103 129 ZP2-XF100HB ZP2-XF125HB Model D 69 89 A 100 125 E 107 135 F 47.5

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

ZP

29.5 46 6 6 25 Width across flat 22 (Hexagon) 81.5 4 x M5 x 12 Rc1/8 Width across flat 22 (Hexagon) 45 80.5 Rc1/8 (G) F 70 (G) 20 28.5 19 50 Y X Y X F E B A D 34 4 30 4 x M4 x 10 E B A D 40 4 30 Dimensions Dimensions B 65 83 ZP2-XF63HB ZP2-XF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 112 X 40.6 46.1 Y 21.5 27.5 B 103 129 ZP2-XF100HB ZP2-XF125HB Model D 69 89 A 100 125 E 107 135 F 47.5

Electric Actuators

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

Table of Contents

Turn cover A counterclockwise until it stops (approx. 45). 4. Install a new element on cover A and insert it into the case. Cover A Case Cover A Case O L L Element O-ring Window 5.