VQ7-6/7-8

(Values at the initial period) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-23 24 Series VQ7-8 DIN Terminal Type 2 position single : VQ7-8-FG-S single (Reverse pressure): VQ7-8-YZ-S 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 Manual

RB/RBL/RBQ

R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Series AP500

(psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

a L1 (mm) L2 (mm) L3 (mm) 200 a = 2000 Pitching Rolling Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page

CC

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Oil draining hole Rc 1/4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0

CNS

1 Cylinder with Lock Series CNS 125, 140, 160 A locking cylinder ideal for intermediate stops, emergency stops and drop prevention. CL Simple construction A force magnifying mechanism is employed based on the wedge effect of the taper ring and steel balls. Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

3

L S 1.0 x 101 B A 1 = m1 + m1 S 2 A2 + B2 12 A 2 Calculate the moment of inertia of the clamping jig. 2 = m2 + m2L2 D2 Arm: 1 Arm weight: m1 8 D when the cylinder bore size is 32.

MXS Series Air Slide Table

With shock absorber (16) MXS16BS, BT, B 19 A 10 37.5 37.5 18 18 55 (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension (Retracted side mounting) Extending Model Shock absorber at retraction end Stroke 10 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 Shock absorber at extension end A Stroke 75 to 125 A Max. 25 Shock

Electromagnetic Digital Flow Switch

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

JXCx-OMT0005CN

A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 (14.2) (2) 2 1 5.5 (18) (14) A1 B1 1 6 5 17.7 (3) 2 1 A6 B6 6.3 16 15 30.7 L (11) 59 - 15.3 [5m ] LE-CP--B(1) 2 A B-1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1

CLQ

50 100 100 Load weight (kg) Load weight (kg) B 80 80 A A 63 63 10 10 50 50 B W 5 5 40 40 32 32 B: Retraction locking F: Extension locking 25 25 1 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 20 1 20 0.5 0.5 100 500 Maximum speed (mm/s) 100 500 Maximum speed (mm/s) 9-10-4 4 Series CLQ Specific Product Precautions 2 Be sure to read before handling.

High Power Cylinder:

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Note 2) Use series CY1B if the stroke exceeds 1500 mm with a tube inside diameter of 20 mm.

CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 8-26-9. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39 36 36 82.4 50 7.5 MXP10-20B 10 Series MXP Dimensions MXP12 2-M4 x 0.7 depth 6 2-M3 x 0.5 depth 4 Z 3 With metal stopper V K 5 4 G Max. 4 Max. 3 7.5 M 20 Stroke: S MXP12-15 Width across flats 2 Width across flats 6 Piping port A 2-M5 x 0.8