Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3 38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

HRX-OM-Y098

20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity

%silltr

Therc can be a greater pressure drop (up to 100%) but maximum flow (for whatevr size orifice) occurs at 46% of pr DO NOTCOPYWTII{OUT WRTTTEN PERMISSION 1 6 P E U T A T t c T E c H N o L o c Y whers S in mm'and p in bar; 22.a is a constant with the ouarion ffi , which is liters per 60 seconds and per torce (delined by the ruling pressure).

SMC Basic Pneumatics

Therc can be a greater pressure drop (up to 100%) but maximum flow (for whatevr size orifice) occurs at 46% of pr DO NOTCOPYWTII{OUT WRTTTEN PERMISSION 1 6 P E U T A T t c T E c H N o L o c Y whers S in mm'and p in bar; 22.a is a constant with the ouarion ffi , which is liters per 60 seconds and per torce (delined by the ruling pressure).

VQ7-6/7-8

double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2 5.5 PG 4 6 9 PE 3.7 2.7 5 PD 2.8 6.6 8.5

70astamb1

If the kinetic energy obtained is no greater than the absorbable kinetic energy shown in the table above, the life of the cushion seal will be10 million cycles or more. 6-7-6 7 Series MB1 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Construction !3r!5uq yet !9!2!8!4w !7 !6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!

mb1

If the kinetic energy obtained is no greater than the absorbable kinetic energy shown in the table above, the life of the cushion seal will be10 million cycles or more. 6-7-6 7 Series MB1 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Construction !3r!5uq yet !9!2!8!4w !7 !6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!

CQM

D-F7BAVL 32/40/50 (mm) D-F7 V D-F7BAVL D-F7 WV D-A73C D-A80C D-A79W D-J79C D-A7 D-A80 Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol 32 40 50 34 37.5 43.5 3.5 6 8.5 6.5 10.5 12 38 41.5 47.5 The dimension inside ( ) is for D-A72. 35 38.5 44.5 6.5 9 12 6.5 9 12 9.5 13.5 11.5 9.5 13.5 11.5 31.5 35 41 38.5 42 48 6 (6.5) 8.5 (9) 11.5 (12) 6.5 9 12 9 (9.5) 13 (13.5) 11 (11.5) 9.5

Air Cylinder Series MB

D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

MVGQ

Hz RS H A Coil rated voltage (V) 24, 6, 12, 48, 100, 110 DC RZQ Allowable voltage 15% to 10% of the rated voltage 5.6 VA (50 Hz), 5.0 VA (60 Hz) Inrush Apparent power AC (2) MI W S 3.4 VA (50 Hz), 2.3 VA (60 Hz) Holding Made to Order Specifications (For details, refer to page 10-21-1.)

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

CG5-S

(mm) Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA S X Y ZZ P 20 to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 83 15 7 124 1/8 25 to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 83 15 7 129.5 1/8 32 to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

A 4 A 4 A 4 20.5 12 7.5 11.8 (For DIN rail mounting) (Pitch) P = 16 One-touch fitting [4(A), 2(B) port] L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 47 x n2 + 81.5 17.5 20.5 Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

HRX-OM-M090

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

VP4

How to Order Pilot Valve Assembly 1 G 00 VT3112 Rated voltage Electrical entry Note) 1 100 VAC, 50/60 Hz Grommet G 2 200 VAC, 50/60 Hz Note) Even if the electrical entry of the solenoid valve is T, D, TL, or DL, the electrical entry for pilot valve assembly is chosen for G. 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-6-1 2 Series VP450

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to pitch moment load Displacement at "A" when load is applied at "F" Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10