CYP

"n" pcs. Nil S n Cylinder bore size 15 32 15mm 32mm Type of auto switch Nil Without auto switch Select auto switches from the table below.

HRX-OM-S004

OFF Press together OFF ( 0 . 7 i n ) Fig. 4-7 Alarm release 8. Repeat steps 1 to 4 to supply the circulating fluid to the users equipment and piping.

Table of Contents

How to Order Manifold VV5Q13 08 S 1 N F Option Series VQ1000 Nil D None DIN rail mounting style Manifold Cable (Length) Plug-in unit/Flip 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) 0 1 2 3 Special wiring specifications K (2) Stations (Except double wiring) With name plate Built-in silencer, direct exhaust N S 01 1 station Connector entry direction 16 16 stations

VT307

VV307 01 F V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Vacuum Pad: Ball Joint Type

N: M8 x 1.25 Model A B C D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x

HRX-OM-Q026

NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Metal Stainless steel, Copper (Brazing filler metal for the heat exchanger),

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2 30.2 32.1 27.1 27.5 20.4 14.2 1/8 17 11.6 1/8 11.4 (12.7) (12.7) AS221F-01-08 AS221F-01-07 1/4" 8 23.9 18.5 32.4 25.3 15.2 18.5 13.2 31 19 19 AS221F-01-

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

EX500-GPR1A.eng

Consider this key position when selecting sensor. 4 3 1 1 2 3 Input "1" (n+1) 0 Input "0" (n) side Input "1" (n+1) side 1 1 3 3 Input "0" (n) 2 4 key 4 2 M12 Block Sensor connector "0" Sensor connector "1" key 4 3 1 2 1 30 31 Input block up to 8 can be connected ( 16 points ). Input numbers are 0 15 from Input unit side.

AR20-B to AR60-B

Note 3) 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L gauge embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] Square Note 4) 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output: Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch Note 5) NPN output: Wiring top entry ISE35-R-25-MLA [ISE35-R-25-

HRX-OM-R016

Plug (Prepared by customer) L N E [Accessory] Power supply connector N Earth leakage breaker (Secondary side) E L Cable Crimped terminal (Prepared by customer) N E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-R016 Chapter 3 Transport and Setting Up Wiring 1.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.