CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

or more between external terminals and FE 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Vibration resistance for 2 hours in each direction X, Y and Z respectively (De-energized) Impact resistance 147 m/s2 3 times in each directions of X, Y and Z respectively (De-energized) Standard CE marked (EMC directive / RoHS directive), UL (CSA) Weight 300 g

EXxx-OMW0014CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 IO-Link IO-Link 3 4 5 SI 6 . 1-1 12 No.EX-OMW0014CN-A 2. . 2-1 EX245 DC24 V 1 msec IP65(,) (IEC 60529 ) CE/UKCA UL(CSA) RoHS EN505812012 AC500 V1 FE 10 M -FE DC500 V -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 (IEC60068-2-6) 147 m/s 2 XYZ 3 () (IEC60068-2-27) 13 No.EX-OMW0014CN-A 3. 3.1. 6 2M5( = 1.5 Nm

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

ZSE30/ISE30

25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note)

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

100

wire with connector assembly for supply valves and release valves. w Unit e Connector/Lead wire Nil With unit switching function*1 Nil Without lead wire M SI unit only*2 L Lead wire with connector (Length: 2 m) r Light/Surge voltage suppressor (Electrical entry: G, H, L, or M) P With unit switching function (Initial value psi)*1 * For output types N and P, a 3-core lead wire is included

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( . o N t r a P T ) M ( H ) . x e H ( L g n i t n u o M e l o h M 6 1 / 3 M 0 0 5 0 E 2 Q K 1 X 4 1 M 7 1 4 3 5 1 5 . 6 1 5 . 3 0 3 4 / 1 M 0 0 7 0 E 2 Q K 1 X 4 1 M 7 1 5 . 4 3 5 1 7 1 6 . 4 0 3 6 1 / 5 M 0 0 9 0 E 2 Q K 1 X 6 1 M 9 1 8 3 7 1 5 . 8 1 6 8 4 8 / 3 M 0 0 1 1 E 2 Q K 1 X 0 2 M 4 2 5 . 2 4 1 2 1 2 7 2 6 2 / 1 M 0 0 3 1

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

: 8 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 44.1 29.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5 L2 = 11.5n + 59 n: Stations (Max. 12 stations) Dimensions 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 1 3 08 D0 N ( 00T) D For P, R port inch size Kit designation Plug-in Series VQ1000 1 2 3 4 Electrical entry/Cable length Options 4 1 Stations 2 Note 2) Nil None Specifies DIN rail length Note 2) With back pressure check valve on all stations Special wiring specifications (except double wiring) Note 3) 01 1 station Kit designation Entry direction Standard stations

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.