ZSE30/ISE30

25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note)

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

100

wire with connector assembly for supply valves and release valves. w Unit e Connector/Lead wire Nil With unit switching function*1 Nil Without lead wire M SI unit only*2 L Lead wire with connector (Length: 2 m) r Light/Surge voltage suppressor (Electrical entry: G, H, L, or M) P With unit switching function (Initial value psi)*1 * For output types N and P, a 3-core lead wire is included

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( . o N t r a P T ) M ( H ) . x e H ( L g n i t n u o M e l o h M 6 1 / 3 M 0 0 5 0 E 2 Q K 1 X 4 1 M 7 1 4 3 5 1 5 . 6 1 5 . 3 0 3 4 / 1 M 0 0 7 0 E 2 Q K 1 X 4 1 M 7 1 5 . 4 3 5 1 7 1 6 . 4 0 3 6 1 / 5 M 0 0 9 0 E 2 Q K 1 X 6 1 M 9 1 8 3 7 1 5 . 8 1 6 8 4 8 / 3 M 0 0 1 1 E 2 Q K 1 X 0 2 M 4 2 5 . 2 4 1 2 1 2 7 2 6 2 / 1 M 0 0 3 1

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

: 8 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 44.1 29.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5 L2 = 11.5n + 59 n: Stations (Max. 12 stations) Dimensions 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 1 3 08 D0 N ( 00T) D For P, R port inch size Kit designation Plug-in Series VQ1000 1 2 3 4 Electrical entry/Cable length Options 4 1 Stations 2 Note 2) Nil None Specifies DIN rail length Note 2) With back pressure check valve on all stations Special wiring specifications (except double wiring) Note 3) 01 1 station Kit designation Entry direction Standard stations

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)