HRX-OM-O021

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

IDX-OM-W023

N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Socket side Flat Ribbon Cable Assembly 2 x M2.6 x 0.45 Cable length (L) 10 pins 20 pins 26 pins AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 1.5 m 3 m 5 m D-sub Connector Cable Assembly Cable Color List of Each Terminal No. Terminal no.

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

5

Through-hole: CQ2YB/CDQ2YB Both ends tapped: CQ2YA/CDQ2YA CDQ2YA Both Ends Tapped R R O1 thread (mm) Bore size (mm) O1 R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 Auto switch Lead wire min. bending radius 10 2 x P (Rc, NPT, G) (Port size) H thread effective depth C 4 x N through 8 x O counterbore F Q D Z M E J W E M K L B + Stroke A + Stroke With boss on head end With Boss on Head End

Air Pilot Operated Series NVSA

Jr., l,t, 3 . j ':;',14 . , : ; , , I r , ' ' . , I I I I r . . , , r , , , , . . , , . . r l r l , r r t r t r r _ : , r r r t , r ' : , ' , , , r , , , . , , . ' 1 1 1 i , , 1 : : : ; , , , , 1 ' . 1 i , , , " " ' . , : : ; : : l i , : , : : . l i : : ; , , , , : : , : , , ; , , , " . : : : ; ; : : , : . : . 1 ; i : : : : : : : : : ; ; " ' . 1 , , r 1 1 i , r r " : : " ' l i , ' r . : 1

90

M ZK2 ZS A E A G Supply valve, self-holding type (Linked to release valve) Supply valve only (Single) e Rated voltage r Lead wire entry direction C L LO q w e r t q Rated pressure range and function 5 6 24 VDC 12 VDC For plug-in (Manifold common wiring) L-type plug connector with lead wire (Individual wiring) L-type plug connector, without connector E F V 0 to 101 kPa 100 to 100 kPa 100 to

S

VM-07A Polyacetal roller Cross Roller Plunger VM-07AS Hardened Steel Roller (N)VM430 01 T H R E A D PT N NPT* Remove (N) when ordering 01 1/8 P O R T S I Z E M A N U A L O P E R AT I O N Toggle VM-08A Push ButtonMushroom VM-30AR Red Push ButtonMushroom VM-30AB Black Push ButtonMushroom VM-30AG Green Push ButtonMushroom Lock down XT34-11-21R Red Push ButtonExtended VM-32AR Red Push ButtonExtended

Modular Type Air Filters Series AF

Note 3) Bowl assembly for the AF30 to AF60 models comes with a bowl guard (steel band material). 332 Air Filter Series AF10 to AF60 Dimensions AF10, AF20 AF50, AF60 T N S M J U Bracket (Option) Bracket (Option) D R B C T M J V Q N S IN OUT D U OUT R C 2 x P (Port size) V Q IN OUT o s Clearance for maintenance OUT Drain G A 2 x P (Port size) AF30 to AF40-06 B D J M U N S T Bracket (Option)

Plug-in Unit

0.5 m 1 m 3 m 5 m Socket side: Straight Plug side: Straight 010 050 1 m 5 m SSPS Socket side: Angle Plug side: Angle SAPA Connector specifications S A Straight Angle Cable core wire colors Terminal no.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Prevents Micro-Bubbles

LVA LVH A R P 3 port N.C. PA LVD N.C.

Multi-channel Digital Sensor Monitor ( compatible)

Direct parameters page 1 DPP1 address Access Parameter name Initial value (dec) Contents 0x07 R Vendor ID 0x0083(131) SMC Corporation 0x08 0x09 PSE202A PSE202A-M PSE203A PSE203A-M R Device ID 0x000154(340) 0x0A 0x0B -83No.PS-OMW0012-C ISDU parameters Sub Index index Access 1 Parameters Initial value Remarks (dec) (2) 0 W System command Refer to "System command" on page 85. 0x0002 (12) 0

Air Pilot Operated

I I +.--' +-\ ae " "f -a1-a -; l-nr l : r #4E'ii rffi:-i,=' .

Title not found

Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

VDW Series

[Tightening torque: 0.90.1N m (0.670.07ftlb] 3 Attach brackets to the manifold bases. {when equipped with brackets} [Tightening torque: 0.90.1N m (0.670.07ftlb] Note) Manifold station additions can be made in units of 2 or 3 stations.

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

Information

L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

o

Tgpe 546,/ Side Ported, lr,.:.r. ':.rr' , :.:ri r:r, ':,:: r:, L Type Plug Connector (L) r' M Type Plug Connector(M) NW5J3-S46+!!