CRB2/CRBU2/CRB1

(mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

VQZ1000/2000/3000

PE port 18 18 5-Rc 1/8, 1/4 1(P), 2(B), 3(R2), 4(A), 5(R1) port 2.1 28 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ2150 1(R)-L-01 02 DIN terminal (Y): VQZ2150 1(R)-Y-01 02 Indicator light 300 98 (Lead wire length) 68 Pg.7 51.5 <56.5> Applicable cable O.D. 3.5 to 7 101.5 Max. 10 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5

Table of Contents

1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

15 17 9 1/8 (P, R port) 42 L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D, Y): 10-SYJ54MD Y-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) 65.5 [67.7] Applicable cable O.D. 3.5 to 7 82.4 74.9 49.6 [56.6] Max. 10 63.6 34.2 M8 x 1 48.5 54.1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 75.5 74.6 55.7 [57.9] 64.6

Made to Order

Applicable rod end nut Bore size (mm) I type single knuckle I-12 I-14 I-16 I-18 I-20 I-25 I-30 Y type double knuckle Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 Y-30 I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 180 200 250 300 NT-12 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125 65 100 181 18 CS1 CS2 125 65 105 186 18 140 76 110 198 21 155 83 125 223 23 -X -X 160

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

Air Cylinder

0.4 J 0.65 J 1.2 J Rubber bumper CM3 Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion CG1 (Effective cushion length (mm)) Female thread 0.11 J 0.18 J 0.29 J 0.52 J Refer to pages 262 to 266 for cylinders with auto switches CG3 * Operate the cylinder with in the allowable kinetic energy.

Possible to transfer a workpiece at low-speed.

XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

ZP

K Y A J K B Y C D Misc.

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7