CL

x 1.5 l m t Applicable snap ring Part no.

Modular Design with Uniform Body Style

min (ANR) 450 L/min (ANR) 1100 L/min (ANR) [AFD] 120 L/min (ANR) 240 L/min (ANR) 600 L/min (ANR) Nominal filtration rating*2 [AFM] 0.3 m (99.9% filtered particle size) [AFD] 0.01 m (99.9% filtered particle size) Outlet side oil mist concentration*3, *4 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

7 None Blue 8 White Purple Triangle mark position 6 Red 9 Black Gray 10 Black White 26 2 25 1 11 Red White W 12 Red Yellow 13 Red Orange 14 Black Yellow (15.6) Terminal no. 15 Black Pink L 16 White Blue 17 None Purple Flat Ribbon Cable Assembly 18 None Gray Cable length (L) 26 pins 20 pins 10 pins 19 Black Orange 1.5 m AXT100-FC26-1 AXT100-FC10-1 AXT100-FC20-1 20 White Red 3 m AXT100-FC26

CJ5-S

t l m L Part no.

CJ5-S

t l m L Part no.

Compact 5-Port Solenoid Valve

type (0.6 m) L type (1.5 m) L type (3 m) S6m type (EX600)*4 SAm type (EX245)*4 Sm type (EX250)*4 Sm type (EX260) S3m type (EX120) 680 471 404 514 698 829 520 448 367 689 480 413 523 707 838 529 457 367 709 500 433 543 727 858 935 549 477 391 914 705 638 748 932 1063 1100 754 682 568 *1 Weight: W is the value for the internal pilot specification, the max. fitting size, and the manifold

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

5 Port Solenoid Valve SY Series

(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3120-W0(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx. 300

MHZ2/MHZJ2

End boss type One-touch fitting K End boss type with M5 port M Specifications Flat finger type 10, 16, 20, 25 Double acting, Single acting (normally open, normally closed) Air Type Cylinder bore Action Fluid Dimensions 4-MM thread depth L Attachment mounting threads A D G D W B B A C S O Unit: mm C D MM L W G Open Closed B Model A MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Compact

The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts

MY1

Load weight (kg) Caution The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m m m Moment (Nm) M = F x L F3 M = F x L M = F x L F F2 L2 L1 L3 Maximum load weight Select the load weight from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes exceed even the operating limits shown in the graphs.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

CJ2

Bore l Part No.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VS 8-2/VS 8-4

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section