NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !

Proposals for Energy Saving

1 r t y !2 e !4 !5 !4 !5 !

Compact Cylinder

(Single acting/Spring extend) Bore size (mm) 1 2 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Piston rod 3 Collar 4 Retaining ring Bushing Return spring Bronze element Retaining ring Plug with fixed orifice Steel ball 5 6 7 8 9 10 11 12 13 14 15 16

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

MXQ

5 MX MTS t !6 r u y w !

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CRJ

(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Cylinder with Lock Series CNS

RR1 CL1 MLGC CNG I Type Single Knuckle Joint MNB CNA MM A2 8 NDH10 Material: Cast iron (mm) CNS Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part no.

Cylinder with Lock Series CLS

1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.

Dual Rod Cylinder Series CXSJ/CXS

0 y i t o w !

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption

Pressure Sensor Controller

PSE3 0(T) PSE3 1(T) NPN open collector output: 2 outputs NPN open collector output: 2 outputs Max. 30 V, 80 mA Residual voltage 1 V or less Max. 30 V, 80 mA Residual voltage 1 V or less Analogue output: 1 to 5 V Output impedance: Approx. 1 k Analogue output: 4 to 20 mA Max. load impedance: 300 (12 VDC) 600 (24 VDC) Min. load impedance: 50 PSE3 2(T) PSE3 3(T) Auto shift input Voltage

KK/KK13

21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2 31 1/2 30 32 24.5 M28 x 1.5 62.6 -16E 13 25 16 106.2 125.0 6 S e r Dimensions/Socket (S) Male thread type A2 A1 T D H L L (mm) A2

Cylinder with Lock Series CNS

8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part No.

S Couplers Series KK/KK13

Female thread type Female thread type L1 L1 T 20 27.2 13 T Width across flats H Width across flats H H Width across flats 103 H Width across flats 27 T Connection female threads T Connection female threads Effective area mm Min. bore Weight g Model Effective area mm Min. bore Weight g Model L L Rc 1/4 Rc 1/4 47 35.5 KK13S-02F KK13P-02F 17 10.5 25.7 22 Rc 3/8 32 Rc 3/8 107 52 39 -03F -03F

Rotary Gripper Series MRHQ

0 t MHZ MHF MHL MHR MHK Description Material Note Component Parts !8 !9 @2 @0 @1 No.

58

CS2 XA0 to 30 Standard type Double acting double rod CS2 CS2W XA0 to 30 < = < = Smooth cylinder CS2Y Double acting single rod XA0 to 30 Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 Symbol: A4 C DA C0.5 30 RD 30 30 A H H H W1 H L T H Symbol: A8 Symbol: A9 Symbol: A5 Symbol: A6 Symbol: A7 C 0.5 file chamfer AL B MM RD B AL MM AL MM WA C DC 30 H 30 H 30 30 L W H W1 T H H Symbol: A10 Symbol: