Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

stroke adjuster at extension end) 20 F 35 62 58 48 26 18 1 6 4 x M5 x 0.8 thread depth 7 N x M5 x 0.8 thread depth 6 (Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA x M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

Modular/F.R.L. Units Series AC

T-interface: (T) M5 x 0.8, 1/8, 1/4, 3/8, 1/2 E Using a T-interface facilitates the redirection of air flow.

CG1

Bore size (mm) MM W TC NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 35.5 44 55 69 80 100 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VZA2000

2 x 2.8 Mounting hole Manual override (Non-locking) Manual override (Non-locking) 5 x M5 x 0.8 5 x M5 x 0.8 3 position closed center: VZA2321-M5 3 position exhaust center: VZA2421-M5 SYA SYJA VZA VFA Pilot port (A side) Mounting hole 2 x 2.8 VFRA Pilot port (B side) 2 x M5 x 0.8 VA 2 x 2.8 Mounting hole Manual override (Non-locking) 5 x M5 x 0.8 1755 Series VZA2000 Dimensions: Base Mounted

5 Port Air Operated Valve SYA3000/5000/7000 Series

fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3 20-M5 3 4 5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 1463 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Base Mounted 2 position single SYA3140-01 2

SYA3000/5000/7000

4" 6, 5/32" 2 x 2.2 (For manifold mounting) Manual override (Non-locking) SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 x 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center / exhaust center / pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 SYA SYJA One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4

VK3000

(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2 port: M5 x 0.8 P port: Rc 1/8 NPT Note) Applicable only for DIN terminal type NPTF 1421

Free Mount Cylinder for Vacuum Series ZCUK

size ZF 2 x M5 x 0.8 (32: 2 x 1/8) 2 x P through ZP SP Seal washer GC + Stroke Vacuum port size ZCUK d Through AMJ Width across flats L 2 x P through 4 x T counterbore AMV AEP SA + Stroke S + Stroke Z + 2 x Stroke HEP Related Equipment Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY 16.5 Note 1) GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 ZC(D)UKC16 ZC(D)UKC20

e

32.5 4 x M5 x 0.8 depth 8 2 x 2 x 9.5 counterbore depth 5.4 5.5 through hole FG terminal M3 140 + Stroke Controller (51.8) 15.5 87.3 Motor position T With floating bracket (2 x M5 x 0.8 thread depth from bottom of counterbore 7.5) 2 x 10 counterbore depth 2 I/O cable Note) Slot for auto switch 32.5 Power supply cable (2 wires) 80 20 160 + Stroke (500) 60 Motor position D Note) For the 3-

Air Cylinder Series CM2

0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Specifications 10(Relief type) 11(Vacuum type) Rod end thread Female thread Male thread Bore size (mm) +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port 32 40 50 63 32 40 50 63 M5 x 0.8 M5 x 0.8 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa 11(Vacuum type

Stainless Steel 316 Fittings

x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 M M L Note) Value of FEP tube.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

1 M5 x 0.8 10 to 16 6 tube Pad dia.

MHF2

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHF2

Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Auto Switch Mounting

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Symbol Manifold Without port Nil 0 2 3 5 Filter only Vacuum pressure switch 0 1 2 3 4 5 Without fitting (M5 x 0.8) Without fitting (M5 x 0.8) VVQ1000-50A-M5 KJS04-M5 4 (Straight) 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 Single unit KJS06-M5 6 (Straight) 4 (Straight) KJS04-M5 VVQ1000-50A-C4 KJL04-M5 4 (Elbow) 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45