Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

5 Port Solenoid Valve

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

Mechanically Jointed Rodless Cylinder Series MY1

(Except 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port L L L L L L R R R R R R R L L R R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port cannot be used.

SYJ3000/5000/7000

R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

5 Port Solenoid Valve Series VQZ1000/2000/3000

With light/surge voltage suppressor 1.4 1.6 L-type plug connector (L) (B) 2 Non-locking push type (Tool required) 1 (P) 3 (R) VQZ3000 L-type plug connector (L) N.O.

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l SYJ524-l SYJ524M-l How to Order SS3YJ5--40-05 -M5 R Port

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Battery-less

P Set the workpiece gripping point L so that it is within the range shown in the figure below. External Gripping State Internal Gripping State Finger Finger L L L: Gripping point F: Gripping force L: Gripping point F: Gripping force F F F F Attachment Workpiece Attachment Workpiece LEHF32 LEHF40 Gripping force accuracy: 20% (F.S.)

SX

(Rail mounting hole pitch 12.5) SS5X5-M45FDStations B DIN rail release button (SX5000 pitch) P = 16 (SX3000 pitch) P = 12.5 L dimension: Formulae for L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 91 L3 12.5 M = ( + 1) Omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 4-One-touch fittings 2n1-One-touch fittings (P , R port) Applicable tubing O.D.: 10 (A, B port) Applicable tubing O.D.:

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P Table 2.

7.5

Connector manufacturers: P Hirose Electric Co., Ltd. P Sumitomo 3M Limited P Fujitsu Limited P Japan Aviation Electronics Industry, Ltd. P J.S.T. Mfg. Co., Ltd. D-sub Connector Cable Assembly Electric Characteristics Cable length (L) Item Characteristics Assembly part no.

Table of Contents

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.