REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

VHS

Refer to p. 0-33 to 0-36 for Safety Instructions and common precautions. !0 !0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

HRS100/150

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

3 Port Solenoid Valve

Single r w u e y i q !

ZQ

) S R U N L H L H k P a MOD E SET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 66.9 (63.1) (M5 x 0.8) 57.3 Vacuum port (V port) Note 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust

energy saving effect

V: Power supply voltage Power consumption P: 20 [kW] Q = P = 20 [kW] P Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = 24 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

Thermo-chiller

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Circuits and Wiring Examples p. 9 Options/Part Nos.

V

48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E

Series VS

Wiring & Light / Surge Voltage Suppressor How to calculate Flow (At an air temperature 20C) AC AND 100 VDC AC AND 100 VDC WITH LIGHT WITH LIGHT TERMINAL no.1 (+) TERMINAL no.1 (+) Subsonic flow: P1+0.1013<1.89(P2+0.1013) SINGLE SINGLE Q=226S P(P2+0.1013) Sonic flow: P1+0.1013>1.89(P2+0.1013) ZNR ZNR Q=113S(P1+0.1013) Q: Flow rate under standard conditions [l/min(ANR)] S: Effective area (mm2

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IOL_Autostart DI_C/Q Digital input only. DO_C/Q Digital output only. -75No.EX-OMX1011 IO-Link master unit parameters (continued) No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Element symbol L125 L250 L500 Cleaning level Name Material (Nominal) 5 0.5 Series FQ1010 Series FQ1011 Series FQ1012 15 1 PP Q EHM ... x 3 5 Consult P/A if the number of elements calculated in exceeds two.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Example of how to order a valve SZ Q TUV approved product Enter the standard part number Example of how to order a manifold SS5Z Q TUV approved product Enter the standard part number Note) Contact P/A for details, as there are limitations on product models, voltage specifications and electrical entry, etc.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

53

V: Power supply voltage HRSH 090 HRSH 090 Power consumption P: 7 [kW] Q = P = 7 [kW] P HRSH Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption HRSE w Derive the heat generation amount from the power e Derive the heat generation amount from the output. HRZ supply output. Output (shaft power etc.)