4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

CM2

Please delete the unnecessary part. 1.4-15 Standard: Double Acting Single Rod Series CM2 Front Trunnion (U) CM2U Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) E 20 26 26 32 Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 P 1/8 1/8 1/8 1/4 Bore size 20 25 32 40 K 5 5.5 5.5 7 N 15 15 15 21.5 B2 26 32 32 41 D 8 10 12 14 I 28 33.5 37.5 46.5 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NX NZ Material: Rolled steel C85 Applicable bore size (mm) 125 140 160 180 200 250 300 Y-12 +0.084 0 +0.3 +0.1 0.1 0.3 32 25 64 Part no. 8 46 100 M30 x 1.5 27 42 D C B d H Y-14 125, 140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 0.1 0.3 +0.084 0 +0.3 +0.1 36 28 72 8 48 105 M30 x 1.5 30 47 53.1 44 46 18 M30 x 1.5 C95 Y-16 +0.1 0 +0.3 +0.1 0.1 0.3 40 32 80 8 55 110 M36 x 1.5 34

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Cover dia 1.5 Cross section 0.23mm2 Indicator light 3.5 to 7 : AC 61 53.5 35.5 M plug connector (M): VQZ3l2(R)-lMl-C6, C8, C10, 02 300 (Lead wire) 94.5 Cover dia 1.5 Cross section 0.23mm2 Indicator light 82.5 83.5 37 42 : AC 2.10-10 3 Port Solenoid Valve VQZ100/200/300 Manifold Body Ported Plug Lead Unit Connector kit How to Order Manifold VQZ100 SY SYJ C D VV3QZ 1 2 08 VK VZ DIN rail mount

NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

CS1

A1 L1 MM RR1 NX NZ Material: Rolled steel +0.084 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.12 0 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 125 140 160 180 200 250 300 Y-12 Bore (mm) 32 25 64 Part No. 8 46 100 M30 X 1.5 27 42 C B H d D Y-14 125/140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 36 28

Series IDG

170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150 (5.30) IDG60SM IDG75SM IDG100SM V type A regulator combined with the M type 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59

Ionizer

(High pressure warning label position at 300 mm length) 19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

Series VQ Base Mounted Metal Seal/Rubber Seal

0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa

Compressed Air Preparation Filter

300 20 Micro Mist Separator Dust filtration, Oil mist separation Nominal filtration rating: 0.01 m [Filtration efficiency: 99.9%] Oil mist concentration on the outlet side: Max. 0.1 mg/m3 [ 0.08 ppm] 750 30 1500 40 2200 50 Blue 3700 60 Flow capacity increased by 50% Existing model: 200 L/min (AMF150C) AMK Series p. 18 300 20 Flow capacity increased by 50% Existing model: 500 L/min (AMF250C

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

SMC Pneumatic Clean Series

Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5 14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

AZ1000

V3 V3 MPA MPA 1 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Specifications AZ1001 AZ1002 AZ1006 AZ1015 AZ1010 Operating Parameters 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300