Slider Type Ball Screw Drive/11-LEFS Series

779 456 560 10 4 480 11-LEFS25ll-500l 789 829 506 610 10 4 480 11-LEFS25ll-550l 839 879 556 660 12 5 600 11-LEFS25ll-600l 889 929 606 710 12 5 600 35 524 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS32 5H9 ( ) depth 5 +0.030 0 (122) LEF Encoder cable (7) Body mounting Note 1) reference plane 4 x M6

Series 12-REA Sine rodless cylinder

D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

7ND9071en

G 4 PT 3 + ND9000F_J, ND9000P_J ND9000F/P JB Surge protection G 6 5 G + 4 3 58 7 ND90 71 en 13 DIMENSIONS ND9100, ND9400, ND7100 ND9100/D, ND9100/I, ND9100/K and ND9100/B ND9100, ND9400, ND7100 Linear actuator 20 M20 x 1.5 27.5 170 18 49.5 56 38 114 41 76 23.5 Flush mounting for EC/EJ actuators 13 6 M20x1.5 M20x1.5 30 140 A1 (G1/4) A3 (1/4 NPT) AR (Rc 1/4) 55 G (1/2 NPT) 49 23.5 (35.4) M6

240

MXQ MXF Lateral Mounting (Body through-hole) Lateral Mounting (Body thread) MXW MXJ MXP L1 L L1 MXY MTS L1 12.7 15.6 20.6 24.0 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Model MXH6 MXH10 MXH16 MXH20 L1 12.7 15.6 20.6 24.0 L 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5

CRQ2

L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.

Compact Type

counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 3 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (optional) 30 2 25 Bracket (optional) SMC Max. 4 Panel mounting hole SMC Pressure gauge (optional) Panel Max. 4 Pressure gauge (optional) Panel 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 Approx. 123

ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

KK/KK13

Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.

Low torque Metal seal type Rotary joint

x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10 * flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033

A

www.stevenengineering.com I 5.29 AIR PREPARATION AUTO DRAINS D I M E N S I O N S M6 Hex Cap Bolt (applicable hex. wrench normal size 5) M6 Hex Cap Bolt (applicable hex. wrench normal size 5) Pilot Exhaust Port (both sides) Label Flushing Button Bleed Valve Bracket Mounting Hole (both sides) Bracket (Option) Drain Inlet 1 2 Female Thread See How To Order for type of thread.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 10 14 18 18 22 26 With Mounting Bracket * Refer to basic mounting/(B) for other dimensions and with rod boot.

PA300/500/700

(PA port) Rc 1/8 NO 2(A) 32 42 52 PA 3(R) NC 1(P) Switch mark Rc 1/4, 3/8 47 2-5.2 (Mounting hole) (R port) 41.6 69 68 29.5 28.5 22.5 13.5 Rc 1/4, 3/8 (P port) 5-5-18 7 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA742112.5 41 31.5 (PA port) Rc 1/8 NC NO 2(A) 40 33 PA 4.5 SA Switch mark 2-5.2 52 (Mounting hole) VA (PA port) (Rc 1/8) (Mounting groove for M6

SV

IP CODE IP65 INPUT 16 EX500-IB1 VOLTAGE 24 VDC/650 mA EEX500-IB1-M6 (1 set) EX500-IE1 (8 sets) MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN Unit side MADE IN JAPAN TYPE1 US C R 24 VDC/60 mA/IP65 (PNP) EX500-IE1 Input block EX500-IE1 (4 sets) TYPE1 US C 24 VDC/60 mA/IP65 (PNP) EX500-IE1 R MADE IN JAPAN TYPE1 US C 24 VDC/60 mA/IP65 (PNP) EX500-IE1 R EEX500-IB1-E8 1

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA CDQ2YA Both ends tapped (mm) Bore size (mm) O1 R O1 thread R R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 H thread effective depth C U 4-N through 8-O counter bore Q F 2-P (Port size) (Rc, NPT, G) I 22 D M E Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch

End Lock Cylinder Series CBG1

32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11 81 11 M6