MHZ

6 6 6 6 6 4 4 4 4 4 4 26 27 26 27 26 27 Double acting 3.3 6.1 MHC Normally closed Normally open 1.9 Single acting MHT 3.7 Single acting type, Normally open MHY Note) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

SV

Refer to Precautions 2 on page 1-2-9. 1-2-57 54 Series SV Manifold Electrical Wiring 10C/16C Circular Connector Type (26 pins) @6 @5 Common Common @4 @3 SOL.B Station 12 SOL.A q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i Light/Surge voltage suppressor !6 !7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Table of Contents

8 11 0.75 kW 1.5 kW 2.2 kW 3.7 kW 5.5 kW 7.5 kW 11 kW Thread type Symbol Thread Voltage Nil Rc Symbol Voltage Applicable size Note) F N G 2 3 4 6 8 11 1 NPT Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 10 Note) Hexagonal nipple (R threads) is included as an accessory for the thread symbol F.

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

Battery-less

6 !

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10 15 20 25 32 40 50 63 D-A9 9 13 8 5 6 4 D-M9, D-F9W 5 (2.5) 7 (4) D-Z7/Z80 9 9 11 11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

SMC Pneumatic Clean Series

34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.

HRX-OM-X084

piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4 Option YWith feet and no Rack Mounting bracket . 6-3 6.4.1 Option YWith feet and no Rack Mounting bracket . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

JIS Standard Hydraulic Cylinder

7 5.5 6.5 5.5 6 7 5.5 6.5 CHQ 4.5 4 4.5 4.5 4.5 4.5 4.5 4 4.5 4.5 4.5 4.5 CHK 4.5 5 5 6.5 6.5 4.5 5 5 6.5 6.5 CHN 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

Stability of suction position,

ZP3EU-F6-TB12 [Weight: 236 g] ZP2 ZP2V 26 18 26 18 ZP Width across flats 22 M12 x 1.75 M12 x 1.75 Width across flats 22 ZPT ZPR 6 27 19 52 6 27 19 52 11 11 XT661 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

MB

Foot, Flange, Single clevis: Mounting bolts Double clevis: Clevis pin, Cotter pin Refer to page 6-6-11 for details. 6-6-27 27 Series MBQ Weight/Aluminum Tube Auto Switch Mounting Bracket Part No.

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Manifold S kitSV5Q21, #6 Valve 2 position single SV5Q21, #7 2 position doubleSV5Q21, #8 3 position SV5Q21, #8 Dustproof SI unit: L5=16+108, L6=L3+25, L7=L4+25 Dust tight/jet proof SI unit: L8=16n+118.5, L9=16n+131 L10=L3+50, L11=L4+50 Dimensions (mm) Equation L1=16+53, L2=16+83 n: Station (Max. 16) L n 2 3 4 5 6 7 8 9 10 11 12 13

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

REA/REB

7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100 Usable range 30 40 50 50 40 30

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Pair no. of wire Insulation color Dot mark Dot color LEC Y LEC Y 1 1 Orange Red 2 Black 3 2 Light gray 11 6 Orange Red 12 Black 13 7 Light gray 21 11 Orange Red 22 Black 23 12 Light gray Motorless A side Red 4 Black 5 3 White Red 6 Black 7 4 Yellow Red 8 Black 9 5 Pink Red 10 Black Red 14 Black 15 8 White Red 16 Black 17 9 Yellow Red 18 Black 19 10 Pink Red 20 Black Red 24 Black 25 13 White