Precision Regulator

M6 x P0.5 5.5 M5 x P0.5 4.5 9.5 8.5 71 (17.7) 124 92 Bleed 52.5 63 Exhaust 46 Bleed OUT(2) SUP(1) 43 G OUT 2 SUP(1) OUT(2) 30 50 50 2 x Rc 1/8 9.5 60 35 EXH Pressure gauge port 43 2 x Rc 1/8 Pressure gauge port 35 2 x Rc 1/8 Port size 2 x Rc 1/4 Port size IR300-0 82 60 Mounting hole 12.5 2.3 48 Bracket (Option) Panel mounting hole Max.4 Pressure gauge (Option) Panel When mounting on a panel

Filter Regulator IW Series

Aluminum die-casted/Brass/NBR P218010-1 6 Element Bronze 1301-5B 7 Seal NBR 1301510 DRAIN 8 Filter disk assembly Brass/NBR P218010-16 9 O-ring NBR AS568-228 10 O-ring NBR JISB2401 P4 156 Filter Regulator IW Series Dimensions 15 Panel mounting hole Max. 4 M14 x P1.5 Panel 3.2 BLEED 68 208 60 28 View A OUT SUP 54 46 140 10 Pressure gauge port 2 x Rc1/4 76 7 46 Gauge port 2 x Rc1/4 (20) 4 x M6

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60 1 42 95 49.5 110.6 19.8 66 37 19.2 M6 Glossary of Terms The value in < > is for the aluminum body.

Soft Start-up Valve

U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6

99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246

Magnetic Separator FHM Series

FH FH 140 70 HOW 215 42 20 Hexagon socket head cap screw (M6 x 10) 4 pcs. Handling Precautions Mounting q The flat portion of the stainless steel cover functions as the contaminant adsorption surface.

Slider Type Ball Screw Drive/11-LEFS Series

779 456 560 10 4 480 11-LEFS25ll-500l 789 829 506 610 10 4 480 11-LEFS25ll-550l 839 879 556 660 12 5 600 11-LEFS25ll-600l 889 929 606 710 12 5 600 35 524 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS32 5H9 ( ) depth 5 +0.030 0 (122) LEF Encoder cable (7) Body mounting Note 1) reference plane 4 x M6

Series 12-REA Sine rodless cylinder

D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

7ND9071en

G 4 PT 3 + ND9000F_J, ND9000P_J ND9000F/P JB Surge protection G 6 5 G + 4 3 58 7 ND90 71 en 13 DIMENSIONS ND9100, ND9400, ND7100 ND9100/D, ND9100/I, ND9100/K and ND9100/B ND9100, ND9400, ND7100 Linear actuator 20 M20 x 1.5 27.5 170 18 49.5 56 38 114 41 76 23.5 Flush mounting for EC/EJ actuators 13 6 M20x1.5 M20x1.5 30 140 A1 (G1/4) A3 (1/4 NPT) AR (Rc 1/4) 55 G (1/2 NPT) 49 23.5 (35.4) M6

240

MXQ MXF Lateral Mounting (Body through-hole) Lateral Mounting (Body thread) MXW MXJ MXP L1 L L1 MXY MTS L1 12.7 15.6 20.6 24.0 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Model MXH6 MXH10 MXH16 MXH20 L1 12.7 15.6 20.6 24.0 L 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5

CRQ2

L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.

Compact Type

counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 3 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (optional) 30 2 25 Bracket (optional) SMC Max. 4 Panel mounting hole SMC Pressure gauge (optional) Panel Max. 4 Pressure gauge (optional) Panel 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 Approx. 123

ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

KK/KK13

Tightening of M3, M5, and M6 screws 1) M3 After tightening by hand, tighten an additional 1/4 rotation with a tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with a tool. Over tightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Under tightening can cause loose threads and air leakage, etc. 1.

Low torque Metal seal type Rotary joint

x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10 * flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033

A

www.stevenengineering.com I 5.29 AIR PREPARATION AUTO DRAINS D I M E N S I O N S M6 Hex Cap Bolt (applicable hex. wrench normal size 5) M6 Hex Cap Bolt (applicable hex. wrench normal size 5) Pilot Exhaust Port (both sides) Label Flushing Button Bleed Valve Bracket Mounting Hole (both sides) Bracket (Option) Drain Inlet 1 2 Female Thread See How To Order for type of thread.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63