Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through

Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

Cylinder with Lock Series CNS

2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5

Compact Type Dual-Rod Cylinder Series CXSJ

freezing) 30 to 700 mm/s 30 to 800 mm/s 30 to 600 mm/s Rubber bumper at both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 The maximum piston speed shown in the table above is for extension.

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0 @1 Stopper Resin !1 Replacement Parts Cover !

Thermo-con/Rack Mount Type

400 W (Tap water)*1 510 W (Tap water)*1 800 W (Tap water)*2 1 kW (Tap water)*2 Heating capacity 600 W (Tap water)*1 1 kW (Tap water)*1 1.2 kW (Tap water)*1 1.4 kW (Tap water)*2 2 kW (Tap water)*2 Temperature stability*3 0.01 to 0.03C Pump capacity Refer to the performance charts.

5 Port Air Operated Valve

Manifold base model EXH port type Applicable stations Applicable valve model Series SYA VFA1000 VV5FA1-30 SYJA 4 (A) , 2 (B) port M5, 1/8 Common EXH VZA VFA VFA 5/3 (R) port 1/8 1 (P) port 1/8 2 to 20 stations VFRA VFA130 VV5FA1-31 4 (A), 2 (B) port M5, 1/8 VPA4 Individual EXH SYJA VZA 1 (P) port 1/8 5 (EA), 3 (EB) port M5 x 0.8 VTA VFA3000 VV5FA3-30 4 (A), 2 (B) port 1/8, 1/4 VGA Body ported

Sine Cylinder Series REC

5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22 42.5 40 M32 x 2 1/4 11 181 18 270 281 26.5 51 1033 Series REC Dimensions

Sine Cylinder Series REC

5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22 42.5 40 M32 x 2 1/4 11 181 18 270 281 26.5 51 1033 Series REC Dimensions

240

NS 20 20 25 25 40 40 50 70 70 LT 64 64 74 74 84 84 94 104 114 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 27 MXH Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting Applicable auto switch model (mm) Number of auto switches mounted D-A9, A9V D-M9, M9V D-M9W, M9WV D-M9A, M9AV 1 pc. 2 pcs. 5 10 5 5 5 10 Auto Switch Proper

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

CS1

X 1.5 M45 X 1.5 2 39 26 46 226 182 18.5 20 111 265 115 63 60 50 74 48 17 59 45 30 to 1200 M24 X 1.5 M56 X 2 3 30 49 277 225 25 56 141 335 23 140 20 71 67 60 86 60 69 56 30 to 1200 1 M30 X 1.5 M64 X 2 4 49 36 65 330 270 23 30 146 400 140 20 76 60 80 70 96 79 67 35 to 1200 With auto switch/125 to 200 only (mm) W/o rod boot W/rod boot (mm) W/o rod boot W/ rod boot Stroke range (mm) Style Bore

Compact Cylinder with Air Cushion

Example) RQA 20-30 does not exist.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

VQ7-6/7-8

23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector Type Metal seal type Rubber seal type VQ7-8

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ 12 12 SS 30 M8 x 1.25 x 6 L (Hexagon socket set screw) 6 30 1 Z 2 x 6.9 through 2 x 11 counterbore depth 6.3 28 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2 x M6 x 1 (Through-hole) M6 x 1 x 18.5 L and M6 x 1 2 x M5 x 0.8 Thread depth 7.5 (Hexagon bolt) (Hexagon nut) M6 x 1 x 14 L (Hexagon socket head cap screw) 2 x M5 x 0.8 thread depth 4.5 Note

BP1000

No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.