15

Dimensions: Ball Screw Drive LEFS25 (102) +0.025 0 3H9 ( ) depth 3 Body mounting reference plane Note) 64 4 x M5 x 0.8 thread depth 8.5 45 38 3.5 50 +0.025 0 3H9 ( ) depth 3 Motor type: NZ, NY, NX L A (Table traveling distance) 52 31.5 FF Motor mount 4 x FA thread thread depth FB 10 (52) 57.8 Mounting pitch: FC 38 Motor 38.5 45 47 48 6.5 (48) Motor mating part: FD, depth FE 24 6 M4 x 0.7

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

KA02476 KA00107 FH34 06 to 08 (P32) (G105) (P44) KA00631M KA00102 KA01759 KA00104 FH44 to 64 03 to 04 (P20) (G65) (P30) w O-ring KA00720 Phosphoric FH44 to 64 06 to 08 FKM-70 FKM-90 KA02477 KA00107 Drain plug (P32) ester KA00722 FH34 to 64 10 to 12 (G90) (P44) (P40) KA00636 KA02476 KA00636 (P28) 16 FH341 to 641 DRAIN (P50) (G105) (P50) KA00725 KA01760 KA00725 20 to 24 FH441 (P85) (G145)

0.4

Symbol Compatible protocol Negative common (PNP) Page SDQ SDN SDV DeviceNet EX250-SDN1 EtherNet/IP SDA3 EX250-SPR1 PROFIBUS DP EX500-S103 P.585 EX250-SMJ2 CC-Link AS-Interface, 8 in/8 out, 31 slave modes, 2 power supply systems SDTA EX250-SAS3 EX500 Gateway Decentralized System (64 points) SI unit part no.

5 Port Solenoid Valve

(ARBQ5000-00 A B C 1 5) q AXT632-25-6 (M4 x 114) 4 Valve + Interface regulator SQ w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate.

Digital Flow Monitor

(Refer to page 64.)) (3) Change the set value with or button, and press the button to set the value. Then, the setting moves to setting of OUT2. (The snap shot function can be used. (Refer to page 64.)) (4) Press the button for less than 2 seconds to complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left). Continue with setting the OUT2.

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

JXCx-OMT0061CN

(P.59) 11 - 3. 3.1 (DC24V) DC24V10% 3A 5A A/B 800 / RS485 Modbus EEPROM LED PWR LED ALM L ERR CC-Link L RUN CC-Link 20m oC40 oC() 0 90%RH ) oC60 oC () -10 90%RH ) 2 4.9m/s IP20 50MDC500V 170g() 190g(DIN ) [CC-Link ] CC-Link Version 1.10 1 2 4 (/) 32 /32 4 /4 64 /64 8 /8 128 /128 16 /16 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X

AC Servo Motor Driver (Pulse input type/Positioning type ）

Press the "MODE" button once. 16 64 16. POSITIONING MODE 16.3.6 Parameter mode (1) Parameter mode transition After selecting the corresponding parameter mode with the "MODE" button, pressing the "UP" or "DOWN" button changes the display as shown below.

CJ2

Z S 5 to 1 5 NB NA GA Bore 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 1 5 10 16 5.5 64 76 88 84 96 108 20.5 16 76.5 56.5 5.5 65 77 89 95 119 137 149 85 97 109 115 139 157 169 20.5 16 76.5 56.5 1.3-64 Non-rotating Rod/Direct Mount: Double Acting Single Rod Series CJ2RK 10, 16 How to Order CJ1

CM2

CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) B1 N Bore Stroke range K NA NN S A B2 D H2 I AL MM P 1/8 1/8 1/8 1/4 ZZ E F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 15.5 13 26 5 8 15 5 24 M20 X 1.5 62 18 8 28 M8 X 1.25 116 20 13 8 41 20 33.5 M10 X 1.25 1 to 300 19.5 17 32 6 8 15 5.5 30 M26 X 1.5 62 22 10 120 26 13 8 45 25 34.5 37.5 M10 X 1.25 1 to 300 19.5 17 32 6 8 15 5.5 M26 X 1.5 64

AC

Model Port size A B C D M P N E F G H J K L B B 126.5 8, 1 4 1 23 26 26 33 36 140 181 181 238 253 103.5 140 150 184.5 189.5 40 53 53 70 70 56.8 60.8 60.8 65.5 69.5 30 41 41 50 50 17 25 35 37.5 40.5 50 64 64 84 89 24 35 35 40 40 5.5 7 7 9 9 8.5 11 11 13 13 22 34.2 34.2 42.2 46.2 50 70.5 70.5 88 88 5 7 7 7 7 AC2030 AC2530 AC3030 AC4030 AC4030-06 4, 1 8 3 4, 1 8 3 181 191 225.5 230.5 4, 1 8,

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

Table of Contents

How to Order . 64 64 67 68 69 70 70 70 71 71 72 73 75 76 76 76 77 79 80 81 82 83 83 83 84 85 85 86 87 87 87 88 89 90 91 91 91 92 93 94 95 95 96 99 99 100 101 102 103 105 105 105 106 106 107 107 107 108 108 108 109 109 109 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

EX120/121/122

pins, socket) 64 Communication connector Screw terminal block 5.4 Housing cover 60.8 60.8 63.8 36 22.5 9.5 15 64 10.2 2 28.8 28.8 64 2 9.5 G1/2 Conduit port DIN rail mounting bracket DIN rail mounting bracket DIN rail mounting bracket EX122 EX122-SMJ1, SCS, SSL, SUW1, SUH1 EX122-SDN1(-X26) EX122-S-XP Position indicator LED Position indicator LED Position indicator LED Terminal block cover

0.4

Refer to page 64 for replacement parts.

Electric Rotary Table

Max. 64 points 0.8 1.2 50 6.6 10 Energy-saving product Automatic 40% power reduction after the table has stopped. Value when an external stopper is mounted.

Modular/F.R.L. Units Series AC

A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.

Dual Rod Cylinder Series CXSJ/CXS

Symmetric mounting Note) Dimensions (mm) Bore size (mm) Series Height Width Full length Mass (kg) CXSJ6 0.057 13.4 32 42 + Stroke 6 CXS6 0.095 16 37 58.5 + Stroke CXSJ10 0.114 15 42 56 + Stroke 10 CXS10 Reverse mounting mechanism 0.170 17 46 72 + Stroke CXSJ15 0.219 Reversible 19 54 70 + Stroke 15 CXS15 0.280 20 58 79 + Stroke Bolt holder CXSJ20 0.371 24 62 84 + Stroke 20 CXS20 0.440 25 64

Precautions 1

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

IZx-OMT0049

58 46 40 34 22 16 64 58 46 40 34 22 16 64 58 46 40 34 22 16 40 200 100 20 100 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 Pressure [MPa] Pressure [MPa] Pressure [MPa] MPa MPa MPa a) Air supply from one side IZT4-16,22,34,40,46,58 Tube: O.D. 6 I.D. 4 b) Air supply from both sides IZT4-64,82,112 Tube: O.D. 6 I.D. 4 Measures pressure Measures Air supply 10mm IZT4