Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Male, Mounting: Double Clevis, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 300mm, Motor Option: w/Motor Cover, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: w/Motor Cover, Rod End Thread: Male, Mounting: Foot, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: w/Motor Cover, Rod End Thread: Male, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 300mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 300mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 50mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 50mm, Motor Option: None, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 50mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Male, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic
Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350
speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.