Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

HA AT Max. air flow rate (m3/min (ANR)) ID Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point. With a model that has the maximum flow rate line below the obtained intersecting point, the flow rate will be exceeded, thus leading to a problem such as being unable to satisfy the specifications. AMG AFF AM Misc.

rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A712HDry air, NitrogenHeater type600 to 12000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

SFOD-OMT0009CN

MOT3 (6 ) 17 ENC4 (16 ) 4 18 MOT4 (6 ) ) (+)3 (+) 3 (+)4 (+)4 (+) 19 CI 3 4 ) 3 4 (+)(-) 20 M PWR 3 4 )5. 26 No.SFOD-OMT0009CN-B 4.3 (1) 5.5 (2) DIN 27 No.SFOD-OMT0009CN-B 4.4 (1) DIN (a) (4 M5 ) (M5)X4 (b) DIN DIN DIN (M5X8) DIN 2 4 3.0[Nm] M5X8 DIN 1 2 2 3.0[Nm] DIN M5X14 A DIN B DIN DIN (M5X14) 0.40.6 [Nm] 0.40.6[Nm] 28 No.SFOD-OMT0009CN-B A B M5X14 (2) M3

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

compressor is 30mg/m3(ANR) (ANR) Accessories (Options) Applicable models AM150 AM250 AM350 AM450 AM550 AM650 AM850 Bracket assembly With cap bolt, BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer Symbol AM Order Made P.4.6-6 How to Order AM 250 03 J B Options Body size Accessories (Options) Drain guide 1/4B female thread INOUT reversal Element service indicator None 150 250 350 450 550

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

16 20 25 Female threads Male threads Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa 1.0MPa Rod end threads Rod end thread tolerance Stroke tolerance Vacuum port, relief port Ambient and fluid temperature +1.0 0 0.03MPa 0.025MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C Piston speed Piston rod diameter 1 to 200mm/s 0.5 to 200mm/s 6 M3

High Vacuum Angle Valve, XL Series

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

VFS4000-OMY0001

15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11

rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A712HDry air, NitrogenHeater type600 to 12000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A712HDry air, NitrogenHeater type600 to 12000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A706HDry air, NitrogenHeater type300 to 6000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

Air Catch Sensor

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

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Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

VCA

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

Series VCS

Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light. Electrical Circuits Caution Operating Precautions Conduit terminal Grommet/Conduit Warning 1. Valves will reach high temperatures from high temperature fluids such as steam.

VCW

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light.

XL

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

flow rangeLinearity Note 3)RepeatabilityPressure characteristicsTemperature characteristicsOutput specificationsResponse timeHysteresisPower supply voltageCurrent consumptionResistanceWeightPort size (Rc, NPT, G)PF2A706HDry air, NitrogenHeater type300 to 6000 l/min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152 mm Height: 5.91 in / 150 mm