VCW

OUT L FKM (2) Note) High corrosion resistant specification used for armature material. 1 Thread type IN (1) Rc G NPT Nil F N N.O.

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

VQ4000

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted 12 Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A B C D E F G H 0.56 J NCM-L075 0.81 1.36 0.12 0.63 0.75 0.27 0.98 1.89 3/4", 7/8", 1 1/16" NCM-L150 1.00 1.75 0.12 0.75 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCMK-L150 1.00 1.75 0.12 0.88 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCM-L200 1.5 2.5 0.25 1.38 1.13 0.34 1.63 1.00 3.126 2" Note) NCM-L075 will not fit NCM075S (Single Acting).

Title not found

'i,-.1-)^' l z N F Noz l!

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Compressed Air Preparation Filter

Example 1 2 How to Order AMK F 30 03 B D Option/Semi-standard: Select one each for a to d.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

reduces flow setting time

1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

F.

Refrigerated Air Dryer

P Dimensions (mm) DIN flange 80 A B C D E F G K L M N P Model IDFA150F Port size 950 1290 1332 268 720 1432 475 20 990 217 935 1030 100 IDFAE/F Series Options 1 For How to Order optional models, refer to pages 92, 95 and 98.

Cylinder with Lock Series CNS

Nil Aluminum tubing F Front flange type F Steel tubing G Rear flange type Steel tubing is not available with auto switches. Number of auto switches C Single clevis type Cylinder 2 pcs. Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs.

MK

1 !2 !3 No. !4 !5 !6 !7 !8 !

LFE-OMY0008

OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

With Factory Installed

and 4001) N NPT 40 1/2 B Bracket AW2001 AW4001 F G (PF) C Bowl guard (Only AW2001) Float type auto drain(N.C.)

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

LEC-OM02904

] 2.0 0.550.0 [] 1 19 4 9 4 (c) ON/OFF (MR Confignrator2 TM) TM) (MR Configurator2 (d)(DO) ON/OFF TM)DO (MR Confignrator2 (2) SW2-1 8 9 7 6 A 5 B 4 C 3 D 2 E F 1 0 ON 4E SW1 TEST SW2 1 2 SW2-1 SW2-1 ONSW2-1 4 10 4 4.5.2 (1) (a) 0 (b) 1 ()(16) 2(20) 3(21) 25 92 9F OFF(E9)(1) 1.OFFE930KW 30KW22KW 4 11 4 (2) OFF No.PC051(SW2-1) 8 9 7 6 A 5 B 4 C 3 D 2 E F 1 0 ON 4E SW1 TEST SW2

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

l h h + L8 + H + 2 x Stroke With rod boot at both ends d d e e L8 + Stroke h f l l + Stroke f 2 x h + L8 + 2 x Stroke h + Stroke A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9 32 40 50 63 80 100 125 190 26 7 4 4 94 16 32 10 M10 x 1.25 6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35

Electric Actuator with Integrated Guide

Screw lead LC1-1(Either T-nuts or T-brackets for mounting) LC1-1-1000 (Controller connector) LC1-1-2000 (Controller connector) (Refer to page 85.) F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller.

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4