10

N 306 115 6 1700 N 3 325 134 7 2000 N 449 191 10 6000 N 487 229 12 8500 N 611 287 15 Note) Load on mounting frame is at room temperature (20 to 25C). 916 478 25 Caution 4.

Air Slide Table Series MXQ

1 Holding force (N) 25 60 250 110 160 (Unit: mm) Note) Refer to page 51 for end lock handling precautions.

1

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

Transfer

Special resin Stainless steel Special resin Stainless steel Special resin NBR NBR NBR NBR Special resin Stainless steel Carbon tool steel Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 1 1 2 2 2 2 2 2 4 2 6 4 8 2 2 6 2 1 2 4 4 4 3 4 4 1 1 2 2 4 1 4 2 1 1 1 1 1 2 2 1 1 Description Cylinder tube Head cover WR Head cover WL Piston yoke Piston End cover Wear ring Cushion ring Cushion needle Stopper Belt separator

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

energy saving effect

Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Note 1) 400 V type is provided with an earth leakage breaker with handle (-B1) as standard.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

PFA/PFW

GPM gal (US) Hysteresis mode OFF n-1 n-2 GPM = gal (US) /min Large flow rate "n" H (fixed hysteresis) = 3 digits H H ON Window comparator mode NO OFF n-1 n-2 Large flow rate 19 Series PFA/PFW Digital Flow Switch for Air/Water Flow Rate Setting Flow rate setting mode (manual) 1. Setting Value Input Mode (Manual) 2. Setting in the Manual Mode 3.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

wire length) 103.2 [107.6] L1 Manual override L2 6.5 2-6.5 (For mounting) 17.5 17.5 64.6 [66.8] 43.1 (DIN 44.3) 42.5 (DIN 43.7) 87.2 [91.6] R P P R B B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light

ML2B

(N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Wedge Cam Operation Provides

9 Seal kit NBR MHK12-PS MHK16-PS MHK20-PS MHK25-PS CR(2) P3318113 P3318113-1 P3318113-2 P3318205 P3318205-1 P3318205-2 P3318213 P3318213-1 P3318213-2 P3318305 P3318305-1 P3318305-2 P3318313 P3318313-1 P3318313-2 P3318405 P3318405-1 P3318405-2 P3318413 P3318413-1 P3318413-2 P3318105 P3318105-1 P3318105-2 FKM(2) @0 Dust cover Si(2) Note 1) No. !6 to !

MHK2

F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

Lead wire Lateral type Lead wire Vertical type L L Space L 1 mm or more S O (mm) In-line electrical entry type Perpendicular electrial entry type Lead wire type Auto switch model Finger position D-M9 D-M9V D-F9BAL Air gripper model Open 7 MHK2-12 Closed 3 12 Open 6 MHK2-16 Closed 1 3 13 Open 1 MHK2-20 Closed 1 11 Open MHK2-25 Closed 2 12 Open 3 MHKL2-12 Closed 3 12 Open 1 MHKL2

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95

MK

1 4 Note 1) Above figure is for D-A73/A80.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Manifolds VV5Q J 1 3 08 U0 N ( 00T ) For P, R port inch sizes Kit designation Flip, Plug-in Series VQ1000 1 2 3 Electrical entry/Cable length Stations 1 station 1 2 01 Top entry Side entry Note 1) Stations Kit, Cable length U side U0 S0 Flat cable kit (20P) Without cable 1 to 8 (16) 16 stations 16 n Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed