VCA OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.
6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.
102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706
Address setting switches 1, 2 and 3 ( SW1, SW2 and SW3 ) OFF N.C ON OFF ON With bus terminator Without bus terminator Without bus terminator OFF OFF ON OFF OFF ON OFF OFF ON SW3 1 1 2 100 10 SW3 SW2 0 1 2 9 8 7 6 SW2 3 4 5 0 1 2 0...9 SW1 0...9 9 8 7 6 SW1 3 4 5 0 1 2 1 Common to EX500-S 01/EX500-Q 20 21 Note1: For wiring method, refer to subsection "Wiring" ( page 10 ) of section "EX500"
to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not
[Nm] Roll moment [Nm] 388 Step Motor (Servo/24 VDC) Electric Actuator Miniature Slide Table Type LEPS Series LEPS6, 10 How to Order LEPS 10 K 50 1 1 R 6N q w e r t y u i o !
2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series
Remove case q by hand while supporting it, and remove the element together with case q. 1-5. Pull out element e from cover r. Since the PTFE seal is used, a certain amount of force may be necessary to pull out the element. If there is not enough space under case q, lower case q by about 100mm, and remove the element together with case q. 1-6. Dispose the removed element. 1-7.
Remove case q by hand while supporting it, and remove the element together with case q. 1-5. Pull out element e from cover r. Since the PTFE seal is used, a certain amount of force may be necessary to pull out the element. If there is not enough space under case q, lower case q by about 100mm, and remove the element together with case q. 1-6. Dispose the removed element. 1-7.
F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg
ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.
20 stations (1) VO317-(-Q) (3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) 3 Individual 1 4 1 4 1 4 Note 1) For more than 3 stations, supply air both sides of P port.
Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all
2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !
Enclosure: IP65 Leakage Select from 2 Piping Directions. 1 x 10-10 Pam3/s
100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5
5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.
10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.