VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

PF2A/PF2W

) output impedance 1 k output for display unit PF2A3 Output for display unit Output Note 2) specifications Voltage output 1 to 5 V within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 100 k or more.

Cylinder with Lock

8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Thermo-chiller/Rack Mount Type

5 !9 !6 !7 @0 @1 !8 No.

Digital Flow Switch

Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Compact Type

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) LM Ports 2, 4 size (inch) Nil PNP (+) or without SI unit/input block (SD0) Ports 2, 4 Symbol N3 N7 N9 NM Ports 1, 3, 5 NPN () N 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Mixed Top ported elbow 5/32" One-touch fitting Top ported elbow 1/4" One-touch fitting Top ported elbow 5/16" One-touch fitting Bottom ported elbow 5/32" One-touch

High Power Cylinder:

2 @5 !7 @1 !6 !5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

Compact Cylinder with Air Cushion

17 M6 x 1.0 10 5 28 23 43.5 Refer to page 11 for details on rod end nut and accessories.

Compact Type Dual-Rod Cylinder Series CXSJ

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

5 5 5.5 5.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

Thermo-con/Rack Mount Type

Cooled substance total volume V Cooling time h Cooling temperature difference DT Circulating fluid : 2 L : 15 min : Temperature difference: 10C (10 K). Cool from 30C (303 K) to 20C (293 K). : Tap water Density g: 1 x 103 kg/m3 Specific heat C: 4.2 x 103 J/(kgK) Water bath * Refer to the information shown below for the typical physical property values by circulating fluid.

RQ

1.0 10 5 28 23 43.5 Refer to page 7-7-14 for details on rod end nut and accessories.

Dedicated Controller Series LC1 Uniaxial Type

-K -K Compatible guide High rigidity direct acting guide with brake Slider guide High rigidity direct acting guide Motor capacity 50W 100W 100W 200W 50W 100W 200W 100W 200W 50W 100W 200W Operating temperature range 5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC