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8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328

FSQ seies

polyurelhane tube Seal Kit-How to Order RSory-P"t [,"; Hri'lj,ffL 20 32 40 50 Construction/parts list Fixed mounting heisht SgfieS RSO Ooubfe acling . double acling wift spring . rolle( rd end Lever rod end wi(h buillin shock absorber (only 032, 440, d6o) d20 032.d40.C60 Round bar fod end type (D) Non rotaling rod end type (K) Single acting/roller rod end Q20 Only 1 roller is provided for 032 N2

Process Pump

If a pump is operated by dried air and N2 gas, etc., the deterioration of the inner gaskets will be accelerated and may result in substantially shortening of the product life. 15 Series PB Specific Product Precautions 2 Be sure to read this before handling. Refer to back cover for Safety Instructions.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

NCY2 series

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

VQ20/30

When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 2. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions.

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Finger option 1: Side tapped mounting 2: Through-holes in open/close direction Nil: Basic Standard type Narrow type Auto switch Nil Without auto switch (Built-in magnet) 3: Flat finger N: Basic N2: Through-holes in open/close direction N1: Side tapped mounting Auto Switch Specifications (Refer to the WEB catalog for further information on auto switches.)

Precision Clean Regulator SRP Series

PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid 1.5 Proof pressure MPa 1.0 Maximum operating pressure MPa Low pressure type 0.005 to 0.2 Regulating pressure High pressure type 0.01 to 0.4 range MPa Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

to 4 Valve size 5 to 7 Electrical entry Symbol Table (1) Applicable Fluids VNAA (Valve material: NBR seal) VNAB (Valve material: FKM seal) VNAC (Valve material: EPR seal) GS Grommet with surge voltage suppressor G Grommet Model E Grommet terminal Air (Standard, Dry) Argon Helium EZ Grommet terminal with light/surge voltage suppressor Carbon dioxide (CO2) (Less than 0.7 MPa) Nitrogen gas (N2

Smooth Vent Valve (Supply Line) XVD Series

Fitting size (1/4) Orifice size (3) Application Introducing the full amount of supply pressure (Clean air / N2) all at once when returning the vacuum chamber to the atmosphere will cause particulates to get into the chamber. To prevent this, after slowly introducing the initial air supply and setting the pressure, switch to the main valve circuit to supply the full amount.

Adjustment range: 0.5 to 3mm.Pin clamp cylinder with positioning and clamping at one time, 55 types of guide pins, 4 body types for a broad range of installation conditions, Optional locking mechanism, Precision adjustment of clamping height is possible by choosing the with shim type, Adjustment range: 0.5 to 3mm, GUIDE PIN ASSY, ACTUATOR, CKQ/CLKQ PIN CLAMP CYLINDER, N2, 50MM CKQ, CLKQ

Adjustment range: 0.5 to 3mm.Pin clamp cylinder with positioning and clamping at one time, 55 types of guide pins, 4 body types for a broad range of installation conditions, Optional locking mechanism, Precision adjustment of clamping height is possible by choosing the with shim type, Adjustment range: 0.5 to 3mm, GUIDE PIN ASSY, ACTUATOR, CKQ/CLKQ PIN CLAMP CYLINDER, N2, 50MM CKQ, CLKQ

CLAMP ARM, CLAMP ARM, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 1.23640 lb

Options include rod attachments and auto-switch capabilities.Two styles of clevis widths *, Built-in speed controller, Heavy duty coil scraper, Piping entry orientation can be selected as required, Compact and lightweight, CKZ CLAMP ARM, X6013, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .00000 lb

Options include rod attachments and auto-switch capabilities.Two styles of clevis widths *, Built-in speed controller, Heavy duty coil scraper, Piping entry orientation can be selected as required, Compact and lightweight, CKZ CLAMP ARM, X6013, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .00000 lb

Adjustment range: 0.5 to 3mm.Pin clamp cylinder with positioning and clamping at one time, 55 types of guide pins, 4 body types for a broad range of installation conditions, Optional locking mechanism, Precision adjustment of clamping height is possible by choosing the with shim type, Adjustment range: 0.5 to 3mm, 50MM CKQ, CLKQ ACCESSORY, ACTUATOR, CKQ/CLKQ PIN CLAMP CYLINDER, N2, 50MM

Options include rod attachments and auto-switch capabilities.Two styles of clevis widths *, Built-in speed controller, Heavy duty coil scraper, Piping entry orientation can be selected as required, Compact and lightweight, CLAMP ARM, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 2.20000 lb

Options include rod attachments and auto-switch capabilities.Two styles of clevis widths *, Built-in speed controller, Heavy duty coil scraper, Piping entry orientation can be selected as required, Compact and lightweight, CLAMP ARM, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 2.20000 lb

21287 standard, Bore sizes of 20, 25, 32, 40, 50, 63, 80 and 100 mm, Large stroke range from 5 mm up to 150 mm, Construction is similar to the current CQ2 lateral load resistant specification, Snap ring construction allows easy and quicker maintenance, Auto switches can be mounted on any of the four sides of the cylinder tube, CLEVIS MOUNTING KIT, ACTUATOR, C55 ISO COMPACT CYLINDER, N2