Compact

overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] 11 Model Selection MXZ Series For Pressing (Clamping) (1) Confirm that the clamping jig weight and overhang are within the allowable range as shown in the graphs for transfer.

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

MXW Series Long Stroke Slide Table

=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Residual Pressure Release Valve

pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

S070

-Outside Local Area: (800) 258-9200-www.stevenengineering.com R1.7 7 25.5 3.4 28.5 VT 3.5 150 (Lead wire AWG#26) 27 VP 5 150 (Lead wire AWG#26) ~ = VG 3.5 VP ~ = ~ = S070 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2

3 Port Solenoid Valve Series VQ100 1

= 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.

7

48 VAC 24 VDC VXB GDM2A-L5 GDM2A-L6 GDM2A-L1 GDM2A-L1 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L5 GDM2A-L15 24 VDC 100 VAC 12 VDC 110 VAC VXE 100 VAC 200 VAC 110 VAC 220 VAC With light VXP 200 VAC 230 VAC With light 220 VAC 240 VAC VXR 230 VAC 24 VAC 240 VAC 48 VAC VXH 24 VAC 48 VAC VXF VX3 Gasket Part No. for DIN Connector VCW20-1-29-1 (for Class B) VCW20-1-29-1-F (for Class H) VXA Lead

Integrated Controller

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30

Transfer

Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.

Rotary One-touch Fittings Manifold Series KM

D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Short Stroke Electric Actuator Series LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)