XM, XY

to 40/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68

Table of Contents

VS4 16 stations Max. 16 stations.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

I (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 CD CX D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 I +0.109 0 +0.109 0 +0.109 0 +0.034 -0.015 20 18 13 16 10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Please refer to page of Best Pneumatics Vol. 7. 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counterbore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Nil H Note) Standard type High speed/High frequency type (Without fixed orifice) Note 2) 6, 10, 16 . Integrated type 20, 25 . Non-integrated type Note) Except for 6 mm bore size. Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 Series MQM is not auto switch capable.

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !5 15-9-59 4 Series AS-FM Dimensions: Elbow Type M5 type U10/32 type Applicable tubing O.D. d Applicable tubing O.D. d H H (Hexagon width across flats) (Hexagon width across flats) A L4 A D1 L4 D1 L3 L3 M1 M1 T D2 L1 D2 L1 T L2 L2 Metric Size A L4 Weight (g) d T Model M1 D2 L2 L3 D1 L1 H Min. Min. Max. Max.

Series AS-FM/AS-M/ASD-FM

Note 3) 3/16" is brass (electroless nickel plated). Note 4) 3/16" is POM, stainless steel and brass (electroless nickel plated).

MGG

size (mm) AA AB AC AD AE AF AP A B C D E F G H I J GC GK GL GQ GR 12 16 19 100 35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-FG A (2) L2 (1) L3 T1 T2 H L1 D1 D2 Model Min.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Oil resistant vinyl heavy-duty cord, 6, 0.5 mm2, 2 cores (Brown, Blue), 3 m Note 1) Regarding the common specifications of the solid state switches, refer to page 16. Note 2) Regarding the lead wire length, refer to page 16.