Vacuum Unit

165 L2 45 60 75 90 105 120 135 150 165 180 L3 56.8 71.8 86.8 101.8 116.8 131.8 146.8 161.8 176.8 191.8 L4 67.5 82.5 97.5 112.5 127.5 142.5 157.5 172.5 187.5 202.5 L5 62.5 75 87.5 112.5 125 137.5 150 162.5 187.5 200 L6 73 85.5 98 123 135.5 148 160.5 173 198 210.5 Metric size 06 8.3 4 9.7 8.7 08 11.4 6 Inch size 07 9.7 4.76 12.3 11.3 09 11.4 6 1 Common pilot pressure supply (PS) port is

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

KN Series Nozzles for Blowing

Weight (g) L1 M Width across flats H1 H2 Nozzle size D Model KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 13 14 19 20 22 28 30 35 36 37 30 28 54 55 40 77 79 117 112 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 27 27.7 30.1 30.8 31.5 33.8

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2 Note) 150

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa Number of needle rotations Number of needle rotations Number of needle rotations 14 PF2M7(-L) Series Flow Rate Characteristics at Negative Pressure (Reference Data) When the PF2M series is used with negative pressure (70 to 0 kPa), the measurable range (warranty range of the specifications

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

Suction Filter with Case FH99 Series

75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1/2B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 2B 250 140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

(Default settings) Solenoid Specifications Electrical entry DIN terminal (D) DIN terminal (Y) D, Y Coil rated voltage [V] DC 24, 12 AC (50/60 Hz) 100, 110, 200, 220 Allowable voltage fluctuation 10% of rated voltage*2 Power consumption [W] DC Standard 0.35 (With light: 0.45) 100 V 0.78 (With light: 0.87) 110 V [115 V] 0.86 (With light: 0.97) [0.94 (With light: 1.07)] Apparent

CE2

12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150 36 13.5 116 25 180 18 58 92 139.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 20Mounting Bracket Part No

Modular Type Lubricators Series AL

110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl Metal bowl with drain cock Metal bowl with level gauge B 161 195 195 269 287 Metal bowl

Modular Type Lubricator Series AL

110 110 110 G 27 40 54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 1-5-68 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length

VNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve type Port size Rated voltage Valve size 3 2 1 100 VAC 50/60 Hz Symbol Nil: Non-locking push type Orifice size (mm) Symbol Port size Rc 1 2 3 Note) 4 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 1 MPa N.C. 0.5 MPa N.O. C.O.

VXR21/22/23

VX3 Rated voltage 1 2 3 4 5 6 7 8 9 Valve/Body 0 Normally cosed/Single unit 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) VXA VN Solenoid valve option Nil Standard LVC Select an option mark in page 17-3-11 by Applicable Fluids Check List for special fluids outside of the standard.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.