NVKF

Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

PSE550/300

Model PSE30 Set (differential) pressure range 50 to 500 kPa 0.2 to 2 kPa 0.1 to 1 MPa 10 to 100 kPa 10 to 101 kPa 101 to 101 kPa Pressure range Note 1) For positive pressure For low pressure For vacuum For compound pressure For low difference pressure Rated (differential) pressure range 0 to 500 kPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 2 kPa 12 to 24 VDC, Ripple (p-p)

VK3000

(Pitch) 2n x M5 x 0.8 (A,B port) Built-in One-touch fitting: VV5K3-41Station -C4 Solenoid is at the same side as A port: VV5K3-S41Station (Pitch) Manual override (Non-locking) 2 x 4.5 (Mounting hole) (Pitch) VV061 2 x 4.5 (Mounting hole) Max.5 4 x Rc1/8 (P,R port) (Lead wire length) VV100 (Lead wire length) Manual override (Non-locking) V100 ~ = 300 ~ = 300 S070 VQD VQD-V 2n x M5 x 0.8 (

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Peltier-type Chiller Thermo-con/ Compact Type

Heating Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 800 800 700 700 Heating capacity [W] Heating capacity [W] 600 600 Ambient temperature 35C Ambient temperature 35C 500 500 400 400 300 300 Ambient temperature 25C Ambient temperature 25C 200 200 100 100 0 0 10 20 30 40 50 60 70 Circulating fluid

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY Graph (1) MG 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

LEC-OM02704CN

100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15 0.5 LECSC-S8 LE-S80.9 35 15 0.7 1.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

Mechanically Jointed Rodless Cylinder Series MY1

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

MHZ

100 150 Misc.

MHZ

0.6 MPa 0.5MPa 400 0.6 MPa 0.6 MPa Gripping force (N) 50 Gripping force (N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa