Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

HRX-OM-W002

(Up to 150 records will be recorded.) 10 Alarm history menu 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

HRX-OM-X071

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25 High

High Power Cylinder Series RHC

Cushion adjustment (relief adjustment) labor is the same as general purpose cylinder adjustment (cushion needle adjustment). 200 150 Cushioning quality (RHCF40-500, load weight 5kg, supply pressure 0.5MPa, horizontal drive) High power cylinder 500 General purpose cylinder Cushioning capacity [J] 100 1000mm/s 3000mm/s 2000mm/s 500mm/s 400 Stroke [mm] 300 50 200 100 50mm/s 20 25 32 40 50 63

IDX-OM-U022

300 4.2.2 IDFA100F150F 4 1 4.1 IDX-OM-U022 4. 501015 ( ) ,0 IDFA100F150F 4 2 4.2 IDX-OM-U022 4.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision

MRQ

) 1000 100 Size 0.15 0.3 0.3 0.4 0.5 0.6 0.7 40 32 40 0.34 0.45 0.68 0.9 1.13 1.36 1.58 400 500 40 50 32 0.64 0.85 1.27 1.7 2.12 2.54 2.97 200 250 300 20 25 30 Graph of effective output CRB1 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 3 150 15 CRBU 2.5 100 10 Effective torque (N/m) MRQBS40 2 CRA1 40 40 50 4 5 1.5 32 CRQ 20 25 30 2 2.5 3 1 MRQBS32 MRQ 0.5 15 1.5 0 MSQ 0.4

Rotary Table/

100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement

Free Mount Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0.05 0.01 50 100 300 200 (141) 500 Maximum speed (mm/s) 2. Rod end allowable lateral load Make sure that the lateral load that is applied to the rod end will be no more than the values shown in the tables.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

3 Port Solenoid Valve/

M12 Connector Cable (4 Pins) Made by OMRON Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Part number Cable length [mm] Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the opposite direction 180.

VCS

Lead wire length Series 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 20 30 40 Class 2 Class 3 Class 4 Clip Voltage Electrical entry 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC G C T Grommet Conduit Conduit terminal Flat head screwdriver Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800