Multistage Ejector (N)ZL Series

Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum

Electric Actuators

75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W to 100 LXSHABC LXSHABD LXSHABC-B LXSHABD-B to 50 to 100 292 304 to 50 to 100 Features 4 Line-up of Products Line-up of Products Single Axis Electric Actuator Series LJ1 Series LJ1 LJ1H/High Rigidity Guide LJ1S

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o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single acting sprinq extend Larg bore siro Double acting

11-cq2-e

Besides, be certain that a retaining ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 75 Compact Cylinder/Anti-lateral Load Series CQ2 Replacement Procedure is 32, 40, 50 63, 80, 100 P.290 Construction Standard !3 !2 !1 !2 !1 !

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Single Axis Electric Actuator Series LJ1

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Process Pump

No power supply required Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 5 to 50 5 to 55 Inlet air temperature (C) Note 1) 5 to 55 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) 5 to 50 Standard performance 20 Inlet air flow rate (L/min (ANR)) Note 2) 625 62 125 250 375 Standard performance conditions Outlet air flow rate (L/min (ANR))

AIR CYLINDER

Remarks 1 * Tie-rod Stainless steel 8 2 * Tie-rod nut Stainless steel 8 3 Trunnion Cast iron 1 Metallic painting 29 - Fig. -11 Auto switch mounting bracket (For 125, 140: 25A-BA6-125 /for 160: 25A-BA6-160) Table -20 Parts list (The above auto switch mounting bracket is used only for auto switch type. Item with * mark is standard. ) No. Item Material Qty.

Nozzle Type Ionizer

Model IZN10E-Cm-m Input voltage*1 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC Output current 1 A max Ambient temperature Operating 0 to 40C Stored 20 to 60C Ambient humidity Operating/Stored 10 to 90%RH Standards/Directive CE, cUL *1 For the AC cord type, note that the rated voltage of the AC cord included as an accessory is 125 V (See page 13). 11 Nozzle Type Ionizer IZN10E Series Accessories

Centering Unit

4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side

Floating Joint

, 63 Basic JA Series (Standard) Pneumatic cylinder 0.7 MPa or less 6, 10, 15 1 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) Basic, Foot, Flange Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) JAH Series (Heavy load) Hydraulic cylinder 7 MPa or less 40, 50, 63, 80, 100 Basic, Foot, Flange Refer to the Web Catalog or Best

Modular Type Filter Regulator Series AW

Refer to Features 1 for details. 57 Filter Regulator AW10 to 40 Flow Characteristics (Representative values) Condition: Inlet pressure 0.7MPa AW10 AW30 Rc 3/8 AW40-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 150 125 100 75 50 25 0 1000 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 0 0 500

Compact Electric Actuator Series LG1

/60HZ ) For 100V Single phase 100 to 115VAC (50/60HZ ) R T 1MCCB Equipment Connection Example Noise filter External noise is prevented by the noise filter.

7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

0.5

(Rated voltage 125 V, Plug JIS C8303, Inlet IEC60320-C8) Flow rate adjustment function Nil Without flow rate adjustment function R With flow rate adjustment function Without flow rate adjustment function With flow rate adjustment function e-con connector Cartridge case Bracket IZF 10 IZF 10 IZF 10R IZF 10 IZF 10R 28 ZS C IZF 10 IZF10 A1 B1 *: 4 retaining bolts are included.

08-cds1-e

CS1N160A-PS Retaining plate gasket CS1N180A-PS CS1N200A-PS Guide gasket Lube (2) note) CDS1L125A-PS 125 140 160 CDS1L125A-PS CDS1L140A-PS CDS1L160A-PS Component part numbers: @8, #0, #1, #2, #3, #5. CDS1L140A-PS CDS1L160A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g). Order with the following part number when only the grease pack is needed.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

RB/RBL/RBQ

Substitute 50 for m and 0.3 for . 4. Calculation of kinetic energy E1 Using the equation suitable for the classification of impact.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV