Element Material: S (Stainless Steel 316), Element Size: 100 (ø65 x â„“250), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR)

Element Material: S (Stainless Steel 316), Element Size: 100 (ø65 x â„“250), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin)

Element Material: B (Bronze), Element Size: 100 (ø65 x â„“250), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin)

Element Material: B (Bronze), Element Size: 100 (ø65 x â„“250), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR)

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 20 (2), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR), Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin)

HRX-OM-S004

With or without the terminating resistor (120) of this product can be set by the operation display panel.

HRX-OM-W002

Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3-7 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

HRX-OM-X071

Terminal resistance 1 1 1 9 5 9 5 9 5 SD SD+ SD SG SD+ SD+ SD+ SG SD SG SD SG Termina resistance l 120 ? Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3-11 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

XL-OMV0002

48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10

CG1-SMV13_en

Dublin, Ireland ITALY SMC Italia S.p.A.Via Garibaldi 62, I-20061Carugate, (Milano), Italy LATVIA SMC Pneumatics Latvia SIA, Dzelzavas str. 120g, Riga, LV-1021, Latvia LITHUANIA UAB SMC Pneumatics, Oslo g. 1, LT-04123 Vilnius, Lithuania NETHERLANDS SMC Pneumatics B.V.De Ruyterkade 120, NL-1011 AB Amsterdam, the Netherlands NORWAY SMC Pneumatics Norway AS, Vollsveien 13 C, GranfosNringspark

3

30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L x 110L x 130L CQ-M8 x 95L x 105L x 115L x 135L 50 60 70 50 60 70 75 85 95 75 85 95 85 95 105 125 80 90 100 120

240

448 93 153 260 466 107 174 288 514 120 195 316 562 134 216 343 610 20 Compact Slide MXH Series Table Displacement Table Displacement due to Pitch Moment (Reference) Table displacement (arrow) when a load acts upon the section marked with the arrow at the full stroke of the Compact Slide Table Displacement due to Yaw Moment (Reference) Table displacement (arrow) when a load acts upon the

Clean Exhaust Filter

Graph 1 Exhaust flow rate of cylinder (Meter-out control) 300 Exhaust flow rate [L/min (ANR)] 40 250 Graph 2 Flow rate characteristics The graph shows the flow ranges recommended for each exhaust filter model.

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

MK

C MK2B20-10 MK2B20-20 MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 6 8.5 Moment of inertia (kgm2) 4 MK2l20/25 10.5 2 10 103 6 6 10.5 10.5 4 Operating range 2 9 104 50 100 200 66 120 Cylinder speed (mm/s) ITo attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Standard Stroke Table Bore size (mm) 20, 25, 32, 40 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1) Intermediate strokes not listed above are also available. Note 2) As the stroke increases, more sliding resistance may result due to the deflection of the piston rod and other factors.

Air Cylinder CLA Series Fine Lock Model

-(Exanple: A53) 3m .1 (E)mple: A53L) 5n .2 (Example: A534 ' lf loot bckel is required, order 2 pcs. per cylander. " The clevis mounl @mes with clevis pin, llat washer and sPUlpin, $Ecillcalions Model Cyli nder Specif ications For Lock Unit specifications see page 8 217 PSI (1.5 MPa) 14s PSI (1.0 t\.4Pa) 12 PSI (0.08 [,4Pa) -250:'10, 251 -10O0: ia, 1001-1500:i" Basic, Foot.

Compact Electric Actuator Series LG1

) () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC