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5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40 130 60 146 110 130 50 M10 x 1.5 M10 x 1.5 28

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03

SFOD-OMT0009CN

AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

Digital Flow Switches Series PF2A

Note 6) This product conforms to the CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710, 510 PF2A750, 550 PF2A711, 511 3.0 1.0 10 2.5 0.8 8 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 5 2.5 7.5 0 100 10 25 50 75 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2A751, 551 PF2A721

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Modular Type Lubricator Series AL

54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification

Fluoropolymer Tubing Variations

Air, Water Note 1), Inert gas Fluoropolymer fitting LQ series Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) Applicable fittings Note 2) 20C 100C 200C 260C 1.4 0.7 0.35 0.2 15 9 1.6 0.9 0.45 0.23 25 15 260C Modified PTFE (Polytetrafluoroethylene resin) 1.4 0.7 0.35 0.2 20 10 1.4 0.7 0.35 0.2 40 23 0.9 0.5 0.25 0.15 75 42 Compatible with the Food

Ejector Valve Unit, Series ZYY/ZYX

-40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum

VQ5000

(4.2Cv) 29 (1.6Cv) PA 64 (3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 3 R2 5 R1 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

CRB1BW635 0.030 0 5 0.030 25 0 83 60 PORT 4-R7.5 Top ports (port position): CRB1BW63-SE, CRB1BW63-DE 75 0 0.052 28h9 17 0.006 0.017 15g6 5 B port B port 25 45 80 21 When the B port of body (B) is threaded, it is closed with a Rc 1/8 plug. 3 14 3 14 29 22 Body (B) 15 Body (A) 2-Rc 1/8 A port 14 14.9h9 0 0.043 12 15g6 0.006 0.017 28h9 0 0.052 25 A port B port 75 2-Rc 1/8 8 (8) 82 27

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(4.2Cv) 29 (1.6Cv) PA 64 (3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 5 R1 3 R2 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 40 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--40-05 -M5 R port 1/8 P port 1/8 P, R port thread type Stations A port size 02 : 20 2 stations : 20 stations Applicable blanking plate assembly SYJ500-10-3A Nil A A Rc G NPT NPTF M5 01 M5 x 0.8 1/8 F N T A port M5 x 0.8, 1/8 Note) For more than 9 stations, supply air to both sides of P port and exhaust air

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.