Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Vacuum Filter AFJ Series

capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Standard (Polycarbonate) 5 m 80 100 180 230 200 310 370 Water drop removal type (-S) 40 m 100 130 210 340 230 390 500 80 m Recommended flow rate Note 5) [L/min (ANR)] 5 m 100 140 190 250 210 350 440 Large flow type (-T) 40 m 120 180 230 380 250 480 660 80 m Weight [kg] 0.08 0.18 0.36 Note 1) The size of solid particles collectable

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

P-E99-4A Air Cylinder with Drop Prevention Mechanism — Cylinder with End Lock & Cylinder with Lock — Prevents dropping when air supply decreases or residual pressure is exhausted  Cylinder with End Lock Pick and place Locking door Drop prevention at stro

Open Close Locks Series CBM2 Series CBG1 Series CBA1 Series MBB Locking position Both ends Bore size 20 to 40 Bore size 20 to 100 Locking position Both ends Bore size 40 to 100 Locking position Both ends Bore size 32 to 100 Locking position Both ends Series CBQ2 Series MGP Series CXS Series CXW Locking position Both ends Bore size 20 to 100 Locking position Both ends Bore size 20 to 100 Locking

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

1MPa: Approx. 10.2kgf/cm2 0.2MPa 0.2MPa 100 100 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm MHS2-63D MHS2-63D Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi Pressure 0.6MPa Pressure 0.6MPa 600 600 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 400 400 0.3MPa 0.3MPa 0.2MPa 0.2MPa 200 200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

198 225 235.5 169.5 209 237.5 248 180.5 220 250 260.5 57 Manifold Specification Sheet Series VQ1000/Flip, Plug-in Unit 1.

RZQ

Caution 5 150 100 200 300 1.

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

T/TIA

T0425 T0604 T0806 T1075 T1209 TIA01 TIA05 TIA07 TIA11 TIA13 Color KS KX 100 m reel 150 m reel 200 m reel 500 m reel 20 m roll 250 m reel 500 m reel Black, White, Red, Blue, Yellow, Green KM X3 KF Red, Blue, Yellow, Green X4 Black, White X64 M H/DL L/LL Reinforced corrugated cardboard specification: Longer length reel/-X64 Dimensions KC Dimensions KK Model D1 D2 D3 W Weight (kg)

Fieldbus System

100 k Input impedance 0.05% F .S.

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

XM, XY

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature types (Models/XMH, XYH; Temperature specifications/H0) 1. When a valve is to be heated, only the body section should be heated, excluding the bonnet (handle) section.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

water (Water droplet) (g) How to Order x 100 Inflowed water (Water droplet) (g) Various equipment for drain discharge AMG 250 03 J B Option Body size HA 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 J Drain guide 1/4B female thread R IN-OUT reversal direction Note) Element service indicator (symbol: T) is not available as an option because

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight