3

2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5 60

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Auto Switch Guide

Applicable crimp-style terminal 1.25Y-3L, 1.25-3.5S, 1.25-4M CC RB J D-X 20Data 10-20-69 70 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Band Mounting Style Caution Reed switchD-C73, D-C76, D-C80, D-C73C, D-C80C Solid state switchD-H7A1, D-H7A2, D-H7B, D-H7BAL D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW 1.

Air cylinder (Series compatible with secondary batteries)

1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 65 70 10 55 60 D-M9V

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

119 50 42 56 70 29 30 108 75 128 11-/22-MXP16-30 104 Precision air slide table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive specifications for guide unit -X42 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment Be

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Single Axis Electric Actuator Series LJ1

122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Series MXP Precision Air Slide Table

119 50 42 56 30 108 75 128 170 170 Precision Air Slide Table Series MXP Cautions for Auto Switch Mounting Read before use.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 5 Series SZ3000 Manifold Options SUP blocking disk Blanking block assembly SZ3000-55-1A By installing a SUP blocking disk in the pressure supply passage of a manifold valve, it is possible to supply two or more different high and low pressures to one manifold.

SZ3000

DXT170-75-1) (orange) Solenoid B Caution When locking the manual override on the screw driver operated push-turn locking type, be sure to push it down before turning. Turning without first pushing it down can cause damage to the manual override and trouble such as air leakage, etc.

Direct Solenoid

115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

IDX-OM-Y002

Note 2) Air flow capacity converted by the compressor intake condition [32oC, Atmospheric pressure, and 75% relative humidity] Note 3) The operating range does not guarantee use with normal air flow capacity.

SL5200

(psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75

SYJ300/500/700

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) V100 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate.

5 Port Solenoid Valve, Series VQC

Cable side connector example: OMRON Corporation XS2G Power connector: Franz Binder GesmbH Series723, 5 pins (72309-0115-80-05) Cable side connector example: Franz Binder GesmbH 72309-0114-70-15, etc. DIN type 5 pins No. Function (+) Sensor power supply Description 2 1 SW + Open 2 N.C. 1 Description No.

VQC

Power connector: Franz Binder GesmbH Series723, 5 pins (72309-0115-80-05) Cable side connector example: Franz Binder GesmbH 72309-0114-70-15, etc. DIN type 5 pins No. Function (+) Sensor power supply Description 2 1 SW + Open 2 N.C. 1 Description No.

HRX-OM-S004

5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal

10

75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.