Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Applicable tubing O.D. 3.2 Applicable tubing O.D. 4 Applicable tubing O.D. 6 M5 female thread Straight VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Elbow VVQ1000-F1-LC3 VVQ1000-F1-LC4 08 8 stations Note) 2 pcs. are included in one set. 26 Series ZQ Specific Product Precautions Be sure to read before handling.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

SI Unit: w/o SI Unit, Stations: 8 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 8 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 6 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 8 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 7 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting

SI Unit: w/o SI Unit, Stations: 8 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: EX120 Compatible Cassette Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: -, Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø8 single-action pipe fitting (P-, E-Port), Specification: Internal Pilot Specifications, Applicable valve: SV1000

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: EX120 Compatible Cassette Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: -, Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø8 single-action pipe fitting (P-, E-Port), Specification: Internal Pilot Specifications, Applicable valve: SV1000

SI Unit: 0 (w/o SI Unit), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)