Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

CHKD/CHKG

x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

VM

Push pull VZM550-01-37 Panel mounting hole Stroke 2.7 Position indicator Hexagon nut thick 5, across flats 17 JIS Symbol 2-3.2 mounting hole 20 N F.O.F. 2.7 mm T.T. 5-6-46 45 5 Port Mechanical Valve Series VZM500 External pilot type VZM551 type With foot bracket VZM55-01--F 2-4.5 mounting hole (External pilot port) SA VA SA VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

HRX-OM-X071

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMWith electric conductivity control function

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

VXP21/22/23

$%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

Thermo-chiller/Rack Mount Type

] 59/60 59/60 61/64 61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

VXD21/22/23

Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

39

68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions Without switch XA (mm) Bore size (mm) XA 50 63 100.5 107.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.

Transfer

17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 M10 x 1.0 7 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

VFS

14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

VXZ

Refer to page 17-3-65 for ordering a coil only.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AS22l1F-U02-04A 4 8.2 AS22l1F-U02-06A 6 10.4 23.4 32.7 AS22l1F-U02-08A 8 13.2 23.9 33.2 14.2 18 AS22l1F-U02-10A 10 15.9 26.9 36.2 15.6 19 AS32l1F-U02-06A 6 1/4 17 13 13.3 39 AS32l1F-U02-08A 8 13.2 22.7 33 14.2 AS32l1F-U02-10A 10 15.9 26.7 37 35.7 15.6 40 AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8