5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

IDG

/100SV 614 14-19-51

Speed Controller with

17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

PSxx-OMT0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

C85

15.5 57.5 57.5 16 14 15.5 82.5 82.5 16 14 15.5 15 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F Hs 15.5 31 46.5 16 20 25 8 10 12 8(33) 8(33) 14 12 13.5 58 58 14 12 13.5 83 83 14 12 13.5 D-H7 D-H7C D-H7W D-H7BAL D-H7NF (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W

MXW

Recommended Tightening Torque Recommended tightening torque (Nm) Shock absorber fixing thread size Hexagon wrench width across flats (mm) Model 1.5 M3 x 4 0.6 MXW8 1.5 M3 x 4 MXW12 0.6 1.5 M3 x 4 MXW16 0.6 2 M4 x 5 MXW20 0.8 MXW25 2.5 M5 x 6 1 8-7-9 10 Series MXW Dimensions: MXW8 Stroke: 25, 50 mm Operating port 2-M5 x 0.8 J 10 Width across hexagon socket hole 2.5 5.5 Width across flats 8

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

5 Port Solenoid Valve SY Series

Series SY5000 Series SY9000 Weight (g) Weight (g) Port size Flow characteristics Port size Flow characteristics Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 (P, EA, EB) 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal DIN terminal

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.