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BT-IS 10 10 BT-12 BT12 10 ;J;lA5EJ1A60 17 17 , . ' 0A59W .. 17 0 0 I: C" iD :IJ 0 a. ~ [,lrH5901Y690 I' D-V7P/Y7PV ; ", BSI-1 60 8S'-140 881-125 7 13 12 , D-Y7f:jWIY7OWV .' . 0Y7BAL ' .. 0Z7IJIZ80 D-Y591J1Y690 0.V7P/Y7Pi/ . 8$4125 !

AS-FG/ASD-FG

6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

R 1/4 23 9.5 55.3 1.5 49.3 AS321F-N02-07ST AS321F-02-10ST 1/4" 13.2 27.8 39.3 17 21 31.8 43.3 10 18.5 AS321F-N02-09ST AS321F-02-12ST NPT 1/4 19 23 9.5 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 22 32.8 44.3 12 20.9 AS321F-N02-11ST AS321F-03-06ST 3/8" 17.9 31.8 43.3 21 17 27.8 39.3 6 12.8 AS321F-N03-07ST AS321F-03-08ST 1/4" 13.2 27.8 39.3 17 18.5 29.5 41 8 15.2 20.9 19 R 3/8 23 9.5 53.7 1.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

VCW

11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3

VM

Miniature pneumatic indicator VR3200 Pneumatic-electric relay Dimensions VR3200: 17 x 49 x 71 VR3201: 25 x 86 x 89 VR3201 VR4151 Relay valve 7 5 Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series

JXCx-OMU0004

CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

LJ1H

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F-03-06 AS321F-03-07 6 1/4" 12.8 17 27.8 39.3 27.8 55 39.3

2–4

If screws other than those specified are used, it may cause the switch to be damaged. 3 41 41 38 5 68 68 63 Auto Switch Dimensions Unit: mm Auto switch internal circuits D-M9 Mounting screw M2.5 x 4 Slotted set screw D-M9N D-M9B, N, P Common DC (+) Brown [Red] Indicator light 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black [White] 2.7 2.8 4 22 DC (-) Blue [Black]

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08

LEC-OM02904

7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68