80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66
8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 For use in Japan Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 For use in U.S.A.
Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.
ID=1 bit 7 6 5 4 3 2 1 0 Address 18 19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1) LEC 1(ON)( GW [OUT Data]Address.2, bit0)00(OFF) 11.3 (IN Data) GW bit 7 6 5 4 3 2 1 0 Address 250 ALARM READY 251 252 253
X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side
NC 13 0 V() 24 V() 14 1 15 3 16 5 17 7 18 9 19 11 20 13 21 15 22 NC 23 NC 24 NC 25 0 V() 24 V() EX600-DYPE EX600-DYNE 1325 24 V 1~814~21 DC24 V DC24 V 1325 24 V 1~814~21 FE FE -37No.EX-OMN0035CN-A OFF ON SI (3)EX600-DYF EX600-DYPF EX600-DYNF 1 0 V() 24 V() 2 0 0 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 1 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 2 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6
(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.
(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon
2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.
1/8 With LQ3 fitting With LQ1 fitting (6.35) (1.2) 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 87 77 79 2 (2 x R2.25) 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.
N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.
port PA PAX PB Main port Main port Rc Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry hole: G1/2 Pilot port Manual override (Non-locking) Courtesy of Steven
Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100
ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1
Curved type Air supply unit Note 1) RS RT RG Lateral curve Inside curve Outside curve Qty. None 1 set 2 sets Description Symbol Nil AS AW Angle A unit (Air system 1) 45 90 180 45 90 180 Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs.
LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.
Symbol Nil 10 mm AM Coating color White 1 Weight lbs (kg) 40 (18) 55 (25) 57 (26) 64 (29) 73 (33) 110 (50) AMD Compliant standards UL, CSA Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.