Air Cylinder

to 150 18 15.5 30.3 13 8 22 8 27 5 28 5 6 33.5 5.5, 9.5 counterbore depth 6.5 15 21 M8 x 1.25 24 20 0 0.033 1/8 76 39 12 103 25 1 to 200 22 19.5 36.3 17 10 22 8 31 6 33.5 5.5 8 39 6.6, 11 counterbore depth 7.5 18 25 M10 x 1.25 30 26 0 0.033 1/8 76 43 12 107 32 1 to 200 22 19.5 42.3 17 12 22 8 31 6 37.5 5.5 10 47 9, 14 counterbore depth 10 21 30 M10 x 1.25 34.5 26 0 0.033 1/8 78 43 12 109

SMC Pneumatic Clean Series

Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 175, 200, 250, 300 single rod 1/8 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 1.5MPa 1.0MPa 0.05MPa

Table of Contents

21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 14-2-51 52 Regulator Series AR20 to 60 Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and lead times. 1.

SQ1000/2000

D side 1 2 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Stations Description/Type 4 2 Single 1 5 3 Metal 4 2 Rubber 4 2 Double (latching) 1 5 3 1 5 3 Metal 4 2 Rubber 4 2 Double (double solenoid) 1 5 3 1 5 3 4 2 Closed center 1 5 3 4 2 Valves Options Cylinder port sizes Exhaust center 1 5 3 4 2 Pressure center 1 5 3 4 2 Dual 3 port valve (A) 1 5 3 N.C.

Table of Contents

. 30 4-M6 x 1 thread depth 7 (Thread for mounting attachment) Rc 1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

High Purity Fluoropolymer

Model E M H W L LQ1U1A LQ1U2A LQ1U2B LQ1U2C LQ1U3A LQ1U3B LQ1U4A LQ1U4B LQ1U5A LQ1U5B LQ1U6A LQ1U6B 10 11.5 29 10 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" 25 1 16.5 14 41 14 15 Class 6 17 17 20 54 23 28 21 21 24 63 77 26 26 29 39 102 39.5 36 49 36 Union Flange: LQ1F Metric sizes Applicable tubing O.D.

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Smooth Cylinder/Low Speed Cylinder

Caution 1.

Table of Contents

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

CQ2

1 !2 !3 !

Micro Mechanical Valve Series VM1000

F.O.F. 5.8 mm 21 N 28 5 x 1/8 2 x 3.2 mounting hole VMG T.T. 40 VFM350-02-30R/B/G/Y-X219 Panel mounting hole VR 1.5 1.5 31 30.5 3 25.5 VR51 (Pilot exhaust port) M5 x 0.8 0.8 to 7.5 (150) VHK PE Symbol (119) (C1) 2 (C2) 4 93.7 EXH.1 SUP. EXH.2 VH 18.5 18.5 CYL.2 CYL.1 14 12 23 19 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 26.4 35 30.5 12 VHS 3 x 1/4 2 x 4.2 mounting hole 2 x 1/8 T.T.

CL

4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 215 36 45 45 60 60 75 75 75 223 60 70 86 102 116 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 16.5 16.0 16.0 18.0 18.0 40 40 40 15 17 17 21 21 16 16 18.5 27 30 31 37 40 35 35 39 15 17 17 21 21 16 16 18.5 84 90

LEC-OM02704CN

CC-Link 5 19 5 (4) CC-Link CC-Link (a) 1 (RYn1)(RYn2) DWELL 0 1 3 1 1 3 DWELL 0 1 1 1 5 20 5 (b) , 1 2541 255 0 DWELL 0 1 DWELL [ms](1) 1 0 1 2 0 1 3 0 0(2) 4 0 1 5 0 1 6 0 1 7 0 0(2) 1. 0 2. ,02 5 21 5 1 2 3 4 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 3.00 2000 0 3 3 10.00 1000 0 1 4 6.00 500 0 2(2) 1. 0 2. ,02 0 2 No.1 (100) No.1 (150

Table of Contents

21 01 G VX 2 2 1 21 01 G 1 1 Normally Closed (N.C.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

18.3 R 1/4 19 23 9.8 1.2 49.3 21.3 54.8 AS321F-N02-07SD AS321F-02-10SD 21 10 18.5 1/4" 13.2 27.8 39.3 17 43.3 31.8 80 73 AS321F-N02-09SD AS321F-02-12SD 22 12 20.9 44.3 NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 32.8 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 17 6 12.8 3/8" 39.3 17.9 31.8 43.3 21 27.8 77 80 AS321F-N03-07SD AS321F-03-08SD 18.5 8 15.2 41 29.5 1/4" 13.2 27.8 39.3

MGP

Nm = 0.7375 ftlb 1kg = 2.2046lb 20 Compact Guide Cylinder With Air Cushion Series MGP Model Selection Selecting Conditions Vertical Horizontal l l m Mounting orientation m Maximum speed (mm/s) Graph (Slide bearing type) Graph (Ball bushing type) 400 200 400 200 1 7 , 1 8 1 , 2 3 , 4 1 5, 1 6 21 , 22 1 9 , 20 5 to 9 1 0 to 1 4 Selection Example 1 (Vertical Mounting) Selection Example 2 (Horizontal

Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)