CQ2

6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10 10.5 14 14.5 13 13.5 63 13.5 14.5 14 15 11 12 18 19 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 18 18.5 15 15.5 22 22.5 16.5 17 20.5 21 19.5 20 100 21 24 21.5 24.5

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

SMC Pneumatic Clean Series

D-C73 D-H7B D-H7A1 Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less Refer to page 182 for a list of applicable auto switches.

Tamper Proof and Flat Head Screw

19.7 18.5 3/8" 21 ASD530F-N02-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N02-09ST 28.2 53.7 55.3 1.5 51.3 23 19.8 9.5 19 15.2 5/16" NPT1/4 18.5 49.5 15.4 ASD530F-N02-11ST 32.6 54.1 23.1 18.5 3/8" 21 ASD530F-N03-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N03-09ST 53.7 53.7 1.5 28.2 51.3 23 19.8 9.5 15.2 19 5/16" NPT3/8 18.5 48 14 ASD530F-N03-11ST 32.6 54.1 18.5 23.1 3/8" 21 ASD630F-N04-11ST 64.3

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

LEC-OM02704CN

5.4 5-12 5.4.1 5-12 5.4.2 5-14 5.4.3 5-26 5.5 5-32 5.5.1 JOG 5-32 5.6 5-34 5.6.1 5-34 5.6.2 DOG 5-36 5.6.3 5-38 5.6.4 5-40 5.6.5 5-41 5.6.6 (ON) 5-43 5.6.7 DOG 5-44 5.6.8 5-46 5.6.9 DOG CRADLE 5-48 5.6.10 DOGZ 5-50 5.6.11 DOG 5-52 5.6.12 DOG Z 5-54 5.6.13 5-56 5.6.14 5-57 5.7 5-58 5.8 5-59 6 616-40 6.1 (PA) 62 6.1.1 62 6.1.2 63 6.1.3 63 6.1.4

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

Table of Contents

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 50 100 20 30 40 50 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder

MGP

MGPM, MGPL Common dimensions With double side scrapers Dimensions AW, EW, MT, DS (mm) (mm) For cylinder with double side scraper MT DS Bore size (mm) Bore size (mm) B FB AW FT EW MGPM 17 21 26 26 31 31 36 44 MGPL 15 19 21 21 26 26 31 36 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 63 63.5 69.5 76 82 87 106.5 126 16 16 20 20 22 22 28 35 74 74.5 82.5 89 95 100 120.5 143 5 5 6 6 6 6 6

Table of Contents

Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

CL

21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1 MM N RT RY S W P Bore size (mm) Stroke range H ZZ e f h ZZ l 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 50 63 80 100 125 140 160 6 10 12 12 30 24 26 1001 to 1200 1001 to 1200 1001 to 1400 1001 to 1500 1401 to

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

16" 11.4 52.2 6.2 34.9 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 1/4" 13.2 54.4 7.1 35.7 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 5/16" 15.2 59.8 8.1 36.7 36 68 76 20.9 48.5 22 11 1/4" 17 13.2 59 7.4 45.2 56 121 77.7 18.5 55.4 21 20.6 9.8 1.2 18 5/16" 15.2 64.4 8.2 46 60 27.6 12.4 11.3 1.2 125 20.9 56.4 22 82.1 3/8" 17.9 70.8 9.5 47.2 21 72 AS4001F-11D 3/8" 17.9 27.6 12.4 76.9 10.3 55.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

[131.6] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to the page 91 for dimentions with connector cable. 53 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): SYJ7

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

bases with 5 stations.

LEC-OM07605CN

PF_ _ ]). 5-10 5.2 . 5-12 5.2.1 ([Pr. PA_ _ ]). 5-12 5.2.2 ([Pr. PB_ _ ]) . 5-21 5.2.3 ([Pr. PC_ _ ]). 5-33 5.2.4 ([Pr. PD_ _ ]) . 5-39 5.2.5 2([Pr. PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

KR

(mm) Note) Applicable tubing L1 M1 Weight (g) D1 L2 Q D2 M2 Model a b Urethane Nylon Applicable tubing KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 6 4 10.4 12.8 16 17 19.5 22.5 18 20 4.5 5.3 21 22 17 18.5 18.5 20.9 12.8 15.2 56 44.5 36 27.2 8 5 10 8 8 6 KGT08-10 26.5 28.5 15.2 18.5 18.5 21 23 26.5 6 6.8 14 21 KGT10-12 12 10 Note) D1: Max. diameter K Applicable tubing M H Male Run Tee: KGY D H (width

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !