MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

SYJ300-OMU0003

5000mm 0.2-0.33mm 2 1.7mm DC AC SYJ312-5LO-M3 SYJ312-1LO-M3 SY100-30-4A-20 SY100-30-1A-20 (+-) (1mm) 10 No.SYJ300-OMU0003 DIN (DS) DZ DIN M8 SYJ Series LM S + Z S Z + 4WA 4WA R U +3WA 3WA R U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2 WA 11 No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN )

Secondary Batteries

with secondary batteries ZS-33-M-X221 90 Material restriction Mounting screw (accessory) Type Integrated display 7 R Rated flow range (Flow rate range) 10 50 11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch

VT307

60 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 1 2 3 VQ Light/Surge voltage suppressor 50 60 50 60 Nil None 50 60 4 VKF With surge voltage suppressor (Grommet type is only available.)

VT317

PVT317-53-1A 1 pc.

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

5 Port Air Operated Valve

(No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300/50 Impact/Vibration resistance (m/s2) Note 1) Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SV3000 SOLENOID VALVE. VALVE, DBL SOL, PLUG-IN. VALVE. SV3000 NO SIZE RATING. .45397 lb. 2E.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SV3000 SOLENOID VALVE. VALVE, TIE ROD TYPE W/MFLD BLK. VALVE. SV3000 BUILT IN FITTING 1/4). .66138 lb. UD.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SV3000 SOLENOID VALVE. VALVE, DBL SOL, PLUG-IN. VALVE. SV3000 NO SIZE RATING. .28410 lb. 2E.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SV3000 SOLENOID VALVE. VALVE W/SUBPLATE. VALVE. SV3000 NO SIZE RATING. .77161 lb. 2D.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, VALVE, SUB PLATE TYPE, VALVE, SV3000 SOLENOID VALVE, 2E, SV3000 NO SIZE RATING, .61398 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, VALVE, SUB PLATE TYPE, VALVE, SV3000 SOLENOID VALVE, 2E, SV3000 NO SIZE RATING, .55115 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, VALVE, SOL, VALVE, SV3000 SOLENOID VALVE, 2D, SV3000 NO SIZE RATING, .88184 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, VALVE, DBL SOL, PLUG-IN, VALVE, SV3000 SOLENOID VALVE, 2E, SV3000 NO SIZE RATING, .55646 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, VALVE, SGL SOL, PLUG-IN, VALVE, SV3000 SOLENOID VALVE, 2D, SV3000 NO SIZE RATING, .86795 lb