SMC Corporation of America
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increase by 1C or less for tubing lengths of 5m or less. 10 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 60C (-76F) Specifications How to Order 1 l/min = 0.0353SCFM IDG 60 S 03 B Optional specifications Flow rate by size Outlet air flow rate Purge air flow rate l/min (ANR) None (standard) With purge air discharge fitting Flow direction (rightleft) Nil P R Size 60 75 100 50/27

9 Seal Kit NBR MHW20-PS MHW25-PS MHW32-PS MHW40-PS MHW50-PS 2.8-18 180 Angular Gripper Series MHW2 Dimensions MHW2-20D Flat finger (Standard) 20 2-M5 X 0.8 Depth 7 (Mounting thread) 17 60 4-M5 X 0.8 Depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2-M5 X 0.8 Depth 10 (Mounting thread) 35 23 27 36 26 18 23 7 21H9 +0.052 Depth 3 0 MHZ2 +0.2 +0.1 12 2 16 36 26 MHZJ2

27 A 35.5 26.5 31 31 MKl20 MKl25 MKl32 MKl40 MKl50 MKl63 Auto Switch Mounting Bracket Part No.

10 Series SYJA7000 Dimesions: Body Ported Dimensions: Base Mounted 01 02 2 position single: SYJA7120-01(-F) 2 position single: SYJA714060 2-4.3 28.3 M5 x 0.8 (For mounting) (Pilot port) 1 B A 13 3 A B 1 1 34 27 M5 x 0.8 17 B 2-3.2 A (Pilot port) 35 2-4.5 (For mounting) (For manifold mounting) R1 P R2 63.3 34 8.5 2-3.2 (For mounting) (6.8) 18 35 (Bracket) 68.8 Manual override 1/8,1/4 15 (

5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5 137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 5 45 35 5 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 45 35 3-11-10 11 Conforming to ISO Standard Solenoid Valve

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D Part No.

-XC62W 40 8 places on both sides 22 25 M16 x 1.5 8 16 39 104 50 27 30 M20 x 1.5 9.5 21 45 115 Note) The relationship between the mounting taps (X & Y dimensions) provided on cylinder tubes and their order numbers is as shown above. 63 32 35 M24 x 1.5 11.5 27 53 130 80 40 43 M30 x 1.5 15 36 64 152 100 47 50 M39 x 1.5 17.5 41 76 182 22 Series CHKGB Made to Order Specifications 2 Contact P

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R M L2 D2 L1 2-Applicable tubing M L1 M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 6 7 8 9 12 13 20 21 24 27 KPT04-01 KPT04-02 KPT06-01 KPT06-02

Refer to the theoretical output table on page 27. Selection Conditions: Determine the selection conditions in order, starting from the upper row in the table below, and choose one of the selection graphs to be used.

1414 1767 3.5 9.621 481 577 770 962 1924 2405 4 12.566 628 754 1005 1257 2513 3142 OVERSIZE PISTON RODS Selection Table Oversized Piston Rods Thrust In Piston Rod Diameter lbs 5/8 1 1 3/8 1 3/4 2 2 1/2 3 3 1/2 400 37 83 134 186 In applications where extra column strength is required, or for long push stroke 700 30 68 118 168 202 275 cylinders, oversized piston rods may be required. 1000 27

Qmax Q1 Suction flow rate 3 Series (N)ZL Multistage Ejector How to Order N ZL1 12 K1 12 25 5 M Z E With valve Without valve N ZL1 Fitting Size Lead wire length Air Supply Port Vacuum Port 6 12 1/4" 1/2" Nil N 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter Digital vacuum pressure switch specifications Exhaust specifications For E (ZSE4) EB (ZSE4B) Built-in silencer Port exhaust Nil P 25 26 65 27

velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27

K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20 depth 14.5 M16 x 2 depth 28 27

8 7 6 Conforms to IP40 2 Based-Mounted Type Plug-in Unit Series VQC4000 How to Order Manifolds VV5QC 4 1 08 02 TD0 T Kit VV5QC 4 1 16 03 SDQW S Kit Options Series 4 VQC4000 Input block COM (Indicate for I/O unit only) Manifold type Number of input blocks (Indicate for I/O unit only) 1 Plug-in unit Stations SI unit COM Cylinder port size Refer to manifold specification sheet on pages 27

20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

Analog torque limit 10V/max. torque TLA 27 LG 28 SD Plate 2m max. Personal computer (Note 9) MR Configurator (Note 10) USB cable CN5 (option) (Note 1) Refer to LECSB Operation Manual, section 3.2 for wiring details.

Parameter setting (Driver side) . 23 4.1 power supply specifications . 23 4.2 Overtravel . 23 4.3 Rotation Direction . 24 4.4 Electronic Gear . 25 4.4.1 List of the electronic gear setting for each actuator . 26 4.5 Positioning Completed Width . 27 4.6 Regenerative Resistor . 27 5.