Hydraulic Cylinders

80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note 1) Body dimensions are the same with or without auto switches.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 10 12 13 17 50.9 15.5 15.2 1.5 3 1.6 9 37.6 23 34 47 46 67 66 87 85 6 11 17 21 30 35 45 51.3 38 11 4 5 5.5 6.5 7 8 8 17 14 19 52.3 39 13 16.2 10 19 17 22 56.6 42 16 18.8 12 22 19 24 59.5 46 18 19.3 Male run tee: KFY Applicable tube (mm) A Effective orifice (mm 2) Weight (g) H1

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

P

ZF Flat with ribs (C) Flat style (U) ZP ZP02Ul to 08Ul ZP10Cl to 50Cl ZCU Vacuum related Model Nom.size C10 A 10 B 12 C 4 D 13 E 7.7 F 12 Y 1.7 ZP10Cl ZP13Cl ZP16Cl ZP20Cl ZP25Cl ZP32Cl ZP40Cl ZP50Cl C13 13 15 4 13 7.7 12 1.8 ZP10Ul to 50Ul C16 16 18 4 13 8.2 12.5 1.2 C20 20 23 4 15 9.5 14 1.7 C25 25 28 4 15 9.5 14 1.8 C32 32 35 4 15 10 14.5 2.3 C40 40 43 7 18 13.7 18.5 3.3 C50 50 53 7 18

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

7

VXP Note 2) Conversion Cv Flow rate characteristics Max. operating pressure differential Min. operating pressure differential Note 1) (MPa) Port size Body material Orifice diameter (mm) Model Max. system pressure (MPa) Weight (g) AC DC Kv VXR 480 480 480 720 720 840 1360 5400 6800 8400 1.9 2.4 2.4 4.5 5.5 9.5 13 23 31 49 1.6 2.0 2.0 3.9 4.6 8.2 11.0 19.6 26.4 42.8 1/4 (8A) 3/8 (10A) 1/2 (

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Weight Auto Switch Internal Circuit D-F79 (g) D-F79 D-F7P D-J79 Auto switch model DC (+) Brown 13 11 13 0.5 Lead wire length (m) 57 50 57 3 Main circuit of switch Main circuit of switch OUT Black 92 81 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7P Indicator light DC (+) Brown OUT Black DC () Blue D-J79 Most sensitive position OUT (+) Brown Main circuit of switch OUT () Blue 11-11-18

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

MTS

13 Series MTS Dimensions: 8 MTS8 Basic style Note) Spline rods width across flats have nothing to do with the position of the body mounting face.

IN20267

Figure 13-6 PLC Ethernet MPC Tags will show up in the Controller Tags under the name you gave the MPC 13.2.6. above Figure 13-7 PLC Input and Output Data for the Ethernet MPC 26 - IN20267 Setpoint 14.

1

Refer to pages 11 to 13 for cylinders with auto switches.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

No.EX-OMX1011 PRODUCT NAME Fieldbus system EtherNet/IPTM compatible SI Unit IO-Link Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product

AC Servo Motor Driver (Pulse input type/Positioning type)

Programmable logic controller 2m max. ( Note 8) FX3UMT/ES (Note 13) Diver S/S Servo amplifier 24V 0V (Note 7) (Note 7) (Note 2) L CN1 CN1 24VDC PLC power (Note 4, 1 0 ) 1 DICOM 9 ALM supply RA1 Trouble (Note 6) N OPC 2 (Note 10, 12) 12 MBR Electromagnetic brake interlock RA2 13 DOCOM Y000 PP 23 23 Note1) COM1 (Note 14) 25 Note1) Y010 NP 25 10m max.

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Series IDG

IDG3, 3H IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG-EL5 IDG-EL5H IDG-EL10 IDG-EL10H IDG-EL20 IDG-EL20H IDG-EL3 IDG-EL3H 7 Membrane module kit 8 9 IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 13 Membrane Air Dryer Series IDG IDG30, 50, IDG30H, 50H IDG30L, 50L Optional specifications With fitting for purge air discharge (Option: P) OUT IN Purge Purge IDG60, 75, 100 IDG60H, 75H,

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

MQQ

4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2