CL

3 !4 !5 !6 !7 No.

VXR21/22/23

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

Nozzle Type Ionizer

Static Neutralization Characteristics (Discharge Time from +1000 V to +100 V) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 5 5 0.05 MPa 0.1 MPa 4 4 Discharge time [s] Discharge time [s] 0.3 MPa 3 0.05 MPa 3 0.1 MPa 2 2 0.3 MPa 1 1 0.5 MPa 0.7 MPa 0.7 MPa 0.5 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Distance [mm] Distance [mm] eFemale threads

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Plate Cylinder with Lock Series MLU

Also, BBA2 is included when a auto switch alone is shipped. 3 Plate Cylinder with Lock Series MLU Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

CC

A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 CEP1 L Dimension CE1 (mm) 800 700 600 500 400 300 200 100 50 Effective oil level stroke (mm) CE2 CCT63603.5 503.5 378.5 278.5

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.

Vacuum Regulator Series IRV

Vacuum pump IRV Tank How to Order Filter Suction pad With multiple pressures IRV 000 1 01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

Gun Type Ionizer

08 8 (Metric) 09 5/16" (Inch) Symbol Type 01 AC adapter (With AC cord*2) 02 AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

JXCx-OMT0001CN

) ) 1 2 (+)(-) 14 M PWR 1 2 15 ENC3 (16 ) 3 16 MOT3 (6 ) 17 ENC4 (16 ) 4 18 MOT4 (6 ) ) (+) 3 (+) 3 (+) 19 CI 3 4 4 (+)4 (+) ) 3 4 (+)(-) 20 M PWR 3 4 21 P1, P2 EtherNet/IP EtherNet -28No.JXC-OMT0001CN-C ) 6.

0.5

Cable color Signal name Conductor size (AWG) 1 Brown + 24 VDC 24 2 Blue 0 V 24 3 Green F . G. 24 4 Purple Error signal 24 Part no. L IZF10-CP 3000+60 0 IZF10-CPZ 9850+100 0 IZF10R-CP L 45 4 8.8 39.5 3 2 7 1 4.1 Terminal semi-stripped Wiring/IZF10R Shield 1 5 Pin no. Cable color Signal name Conductor size (AWG) 1 Brown + 24 VDC 26 2 Blue 0 V 26 3 Green F .

Quick Exhaust Valve Series AQ 1

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

HRX-OM-W069

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-

HRX-OM-Z015

WIRING COMMUNICATION . 3-1 3.2 CONNECTED EXPLANATION . 3-1 3.3 COMMUNICATION SPECIFICATION. 3-2 3.4 MODBUS COMMUNICATION FUNCTION . 3-2 3.5 PRECAUTIONS FOR COMMUNICATION . 3-3 3.5.1 Precautions after wiring and before communication . 3-3 3.5.2 Precautions for communicating . 3-3 3.6 SETTING METHOD . 3-4 3.7 COMMUNICATION SEQUENCE . 3-5 3.8 MESSAGE CONFIGURATION . 3-6 3.8.1 Message frame .

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12