Pin Clamp Cylinders Bolt 14.50.1 14.50.1 Manually unlocking Lock ring 1) Remove the dustproof cover. 2) Screw the commercially available bolt (M3 x 25 L or more) into the lock ring shown on the left and raise the lock ring toward the head side. 3) The lock ring and piston rod form a right angle, and the lock is released. (29) LOCK 27 Head side 70 D d 0 0.05 Q Q K SR C 120 45 15.5 14.5 26 (4) MK 8 to 10 14 14
59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)
DC Specification Power consumption (W) Note 1) Temperature rise (C) Note 2) Size Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Size Size 1 Size 2 2.5 3 60 60 Size 1 Size 2 2.5 3 60 60 Note 1) Power consumption, Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.
4"), 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole P-port 2 places Z H-thread C-depth 4 places Q Q J E D-rod Dia.
adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR)
0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !
T R 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30
1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000, #3 SAC2503, #3 SAC4000, #3 SAC4006, #3 SAC5000, #3 SAC6000, #3 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 1.17-6 AL1000 to 6000 Dimensions Metal bowl Option specifications/1000cm 3 tank Metal bowl with level gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122
4 q !3 o @0 !1 !9 !2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !
3 !0 q u !4 e !1 e r t !0 !1 o q y !2 w u !3 i Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK ASS ASR Component Parts Component Parts No. Description Material Note No.
4 q o !3 @1 @0 !1 !0 !2 r MHZ w u MHF e MHL !5 MHR y !9 u t MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR3 !4 !3 MHS q !1 @0 @1 MHC w o MHT e i MHY !5 MHW MRHQ r !7 !6 t !8 !0 !2 i !9 y u Misc.
3 !4 A-A A A u !0 o q e !2 y i w r !1 Table 1 Replaceable Kits List Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !
RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG)
3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
94 11 17.5 Rc 3/8 40 to 100 Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 7-7-14 for details on rod end nut and accessories.
3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !
26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil
3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
Basic (mm) (mm) A B C D E F Yh9 H 25 29 32 38 15.5 20 5 7 M3 x 0.5 M5 x 0.8 5.5 6.5 6 8 MKB12-Z MKB16-Z Clamp stroke Model 11 14 Rod state Model 0 0.043 0 0.043 20 mm Q R 88 115.5 88 115.5 30 mm Q R 108 145.5 108 145.5 10 mm Q R 68 85.5 68 85.5 Retracted Extended Retracted Extended MKB12-Z 45.5 55.5 65.5 MK MK MKB16-Z 45.5 55.5 65.5 MK2T Note) The above figure is with the auto switch (D-M9
Rc 3/8 (Port) W CH LH RR SS NE RR SS H PP QQ NH NC Cushion needle 2-Rc 3/8 (Hexagon socket head taper plug) 2-Rc 3/8 (Hexagon socket head taper plug) GA TT UU UU TT GC Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) G NW A GB N Z + Stroke Rc 3/8 (Hexagon socket head taper plug) WW WW Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) XX XX Centralized piping Centralized