Quick Exhaust Valve Series AQ

3 4 AQ5000 85 75 18 85 15-12-2

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Free flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 340 5.2 250 3.8 20, 25, 32, 40 115 32, 40, 50, 63 810 12.3 810 12.3 130 40, 50, 63 80, 100 1670 25.5 1670

Speed Controller: Standard Type In-line Push Locking Type AS Series

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Specifications Metal handle Port size 1/4 3/8 Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.05 MPa Ambient and fluid temperature 5 to 60C (No freezing) Weight 130 g (Metallic handle: 140 g) Flow rate (L/min (ANR)) 810 Free flow Sonic conductance

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Metal handle Specifications 1/4 3/8 Port size 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.05 MPa Min. operating pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 0.62744 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.54323 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 2.04714 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.3376 lb

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,

7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

HRX-OM-X037

Fig. 2-2 Names of the parts (This drawing shows HRL200-A-40.) 2.2.1 HRL-W-40 (Water-cooled type) Fig. 2-2 Names of the parts (This drawing shows HRL100/200-W-40.) HRL Series 2.2 Name and Function of Parts 2-3 HRX-OM-X037 Chapter 2 Name and Function of Parts Table 2.2-1 Accessory list (1) Operation Manual 2 pcs. (English 1 pc.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

Sub-plate Nil Without sub-plate 02 With sub-plate (port size: 1/4) Sub-plate single type VQ2000 PW 02 Dimensions 4 2-4.5 mounting hole 89.4 Manual override Indicator light VQ210 --02 37 45 5 121 (DC) 130.1 (AC) 22.4 (86.3) (AC) 15.5 (77.1) (DC) Clamp screw M5 x 0.8 External pilot port 78.5 (AC) 72.6 (DC) 70.7 25 25 25 15.4 12 5 2.5 14.5 19.5 G 3/8 Electrical entry 43.8 39.1 53.6 IP65

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

KJ

3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.