Size: 3 (300), Piping and Mounting: 0 (Side Ported Body Mount), No.of Positions: 0 (3 Position Closed Center), Thread: Rc(PT), Port Size: 02 (1/4)

Size: 3 (300), Piping and Mounting: 0 (Side Ported Body Mount), No.of Positions: 0 (3 Position Closed Center), Thread: F [G(PF)], Port Size: 02 (1/4)

Size: 3 (300), Piping and Mounting: 0 (Side Ported Body Mount), No.of Positions: 0 (3 Position Closed Center), Thread: F [G(PF)], Port Size: 03 (3/8)

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: 3-Position Closed Center, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: Rc (R), Plumbing Thread Nominal: 1/4, Mounting Method: Bottom, Plumbing

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: 3-Position Closed Center, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: G, Plumbing Thread Nominal: 1/4, Mounting Method: Bottom, Plumbing Type

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: 3-Position Closed Center, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 27.67, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: G, Plumbing Thread Nominal: 3/8, Mounting Method: Bottom, Plumbing Type

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: 3-Position Closed Center, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 23.06, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: NPT, Plumbing Thread Nominal: 1/4, Mounting Method: Bottom, Plumbing Type

Main Body Shape: Block Horizontal Type, Number of Ports: 4-Port, Number of Switching Positions: 3-Position Closed Center, Operation Status Retention: Retention, Switching Operation: Manual Lever, Effective Sectional Area(mm²): 27.67, Effective Sectional Area Class(mm²): Up to 30, Pipe Port Type: NPT, Plumbing Thread Nominal: 3/8, Mounting Method: Bottom, Plumbing Type

Compact Cylinder with Solenoid Valve/

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.

ZSE5/ISE5

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Quick Exhaust Valve Series AQ 1

Description Material Note q PBT PBT Body A Body A Electroless nickel plated Electroless nickel plated Brass Brass Seat ring Seat ring w w Electroless nickel plated Electroless nickel plated Brass Brass Valve seat Valve seat e e Stainless steel 304 POM Silenser cover Elbow union body r r PVA sponge POM Silencer Spacer t t POM POM/Stainless steel Spacer Cassette y y POM/Stainless steel NBR

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

ITV

As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC and OUT are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u.

SRP

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

5 Port Air Operated Valve SYA3000/5000/7000 Series

SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.) SY5000-26-20A 1 set (Blanking plate assembly part no.) Operating pressure MPa The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.